1/7/2011	12:20:47 AM	Recipe started at 12:20 AM
1/7/2011	12:20:47 AM	Helium valve closed
1/7/2011	12:20:47 AM	BCl3 valve closed
1/7/2011	12:20:47 AM	PH3 valve closed
1/7/2011	12:20:47 AM	SiCl4 pre valve closed
1/7/2011	12:20:47 AM	SiCl4 post valve closed
1/7/2011	12:20:47 AM	Main Vac valve closed
1/7/2011	12:20:47 AM	Bypass valve closed
1/7/2011	12:20:47 AM	Bubbler valve closed
1/7/2011	12:20:47 AM	H2 valve opened
1/7/2011	12:20:47 AM	Helium MFC set to  0.000000
1/7/2011	12:20:47 AM	H2 MFC set to  500.000000
1/7/2011	12:20:47 AM	BCl3 MFC set to  0.000000
1/7/2011	12:20:47 AM	PHl3 MFC set to  0.000000
1/7/2011	12:20:47 AM	SiCl4 MFC set to  0.000000
1/7/2011	12:20:47 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:20:48 AM	Tube furnace set to 0
1/7/2011	12:22:07 AM	Helium valve closed
1/7/2011	12:22:07 AM	BCl3 valve closed
1/7/2011	12:22:07 AM	PH3 valve closed
1/7/2011	12:22:07 AM	SiCl4 pre valve closed
1/7/2011	12:22:07 AM	SiCl4 post valve closed
1/7/2011	12:22:07 AM	Main Vac valve closed
1/7/2011	12:22:07 AM	Bypass valve closed
1/7/2011	12:22:07 AM	H2 valve opened
1/7/2011	12:22:07 AM	Bubbler valve opened
1/7/2011	12:22:07 AM	Helium MFC set to  0.000000
1/7/2011	12:22:07 AM	H2 MFC set to  500.000000
1/7/2011	12:22:07 AM	BCl3 MFC set to  0.000000
1/7/2011	12:22:07 AM	PHl3 MFC set to  0.000000
1/7/2011	12:22:07 AM	SiCl4 MFC set to  0.000000
1/7/2011	12:22:07 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:22:08 AM	Tube furnace set to 1000
1/7/2011	12:42:08 AM	Helium valve closed
1/7/2011	12:42:08 AM	PH3 valve closed
1/7/2011	12:42:08 AM	Main Vac valve closed
1/7/2011	12:42:08 AM	Bypass valve closed
1/7/2011	12:42:08 AM	H2 valve opened
1/7/2011	12:42:08 AM	BCl3 valve opened
1/7/2011	12:42:08 AM	SiCl4 pre valve opened
1/7/2011	12:42:08 AM	SiCl4 post valve opened
1/7/2011	12:42:08 AM	Bubbler valve opened
1/7/2011	12:42:08 AM	Helium MFC set to  0.000000
1/7/2011	12:42:08 AM	H2 MFC set to  500.000000
1/7/2011	12:42:08 AM	BCl3 MFC set to  1.800000
1/7/2011	12:42:08 AM	PHl3 MFC set to  0.000000
1/7/2011	12:42:08 AM	SiCl4 MFC set to  50.000000
1/7/2011	12:42:08 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:42:08 AM	Tube furnace set to 1000
1/7/2011	12:57:08 AM	H2 valve closed
1/7/2011	12:57:08 AM	BCl3 valve closed
1/7/2011	12:57:08 AM	PH3 valve closed
1/7/2011	12:57:08 AM	SiCl4 pre valve closed
1/7/2011	12:57:08 AM	SiCl4 post valve closed
1/7/2011	12:57:08 AM	Main Vac valve closed
1/7/2011	12:57:08 AM	Bypass valve closed
1/7/2011	12:57:08 AM	Helium valve opened
1/7/2011	12:57:08 AM	Bubbler valve opened
1/7/2011	12:57:08 AM	Helium MFC set to  500.000000
1/7/2011	12:57:08 AM	H2 MFC set to  0.000000
1/7/2011	12:57:08 AM	BCl3 MFC set to  0.000000
1/7/2011	12:57:08 AM	PHl3 MFC set to  0.000000
1/7/2011	12:57:08 AM	SiCl4 MFC set to  0.000000
1/7/2011	12:57:08 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:57:08 AM	Tube furnace set to 0
1/7/2011	1:17:08 AM	Helium valve closed
1/7/2011	1:17:08 AM	H2 valve closed
1/7/2011	1:17:08 AM	BCl3 valve closed
1/7/2011	1:17:08 AM	PH3 valve closed
1/7/2011	1:17:08 AM	SiCl4 pre valve closed
1/7/2011	1:17:08 AM	SiCl4 post valve closed
1/7/2011	1:17:08 AM	Main Vac valve closed
1/7/2011	1:17:08 AM	Bypass valve closed
1/7/2011	1:17:08 AM	Bubbler valve closed
1/7/2011	1:17:08 AM	Helium MFC set to  0.000000
1/7/2011	1:17:08 AM	H2 MFC set to  0.000000
1/7/2011	1:17:08 AM	BCl3 MFC set to  0.000000
1/7/2011	1:17:08 AM	PHl3 MFC set to  0.000000
1/7/2011	1:17:08 AM	SiCl4 MFC set to  0.000000
1/7/2011	1:17:08 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	1:17:08 AM	Tube furnace set to 0
1/7/2011	1:17:09 AM	Run finished at 1:17 AM
1/7/2011	1:29:18 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	1:29:18 AM	Recipe started at 1:29 AM
1/7/2011	1:29:18 AM	Helium valve closed
1/7/2011	1:29:18 AM	H2 valve closed
1/7/2011	1:29:18 AM	BCl3 valve closed
1/7/2011	1:29:18 AM	PH3 valve closed
1/7/2011	1:29:18 AM	SiCl4 pre valve closed
1/7/2011	1:29:18 AM	SiCl4 post valve closed
1/7/2011	1:29:18 AM	Main Vac valve closed
1/7/2011	1:29:18 AM	Bubbler valve closed
1/7/2011	1:29:18 AM	Bypass valve opened
1/7/2011	1:29:18 AM	Helium MFC set to  0.000000
1/7/2011	1:29:18 AM	H2 MFC set to  0.000000
1/7/2011	1:29:18 AM	BCl3 MFC set to  0.000000
1/7/2011	1:29:18 AM	PHl3 MFC set to  0.000000
1/7/2011	1:29:18 AM	SiCl4 MFC set to  0.000000
1/7/2011	1:29:18 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	1:29:18 AM	Tube furnace set to 0
1/7/2011	1:30:18 AM	Helium valve closed
1/7/2011	1:30:18 AM	H2 valve closed
1/7/2011	1:30:18 AM	BCl3 valve closed
1/7/2011	1:30:18 AM	PH3 valve closed
1/7/2011	1:30:18 AM	SiCl4 pre valve closed
1/7/2011	1:30:19 AM	SiCl4 post valve closed
1/7/2011	1:30:19 AM	Bubbler valve closed
1/7/2011	1:30:19 AM	Main Vac valve opened
1/7/2011	1:30:19 AM	Bypass valve opened
1/7/2011	1:30:19 AM	Helium MFC set to  0.000000
1/7/2011	1:30:19 AM	H2 MFC set to  0.000000
1/7/2011	1:30:19 AM	BCl3 MFC set to  0.000000
1/7/2011	1:30:19 AM	PHl3 MFC set to  0.000000
1/7/2011	1:30:19 AM	SiCl4 MFC set to  0.000000
1/7/2011	1:30:19 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	1:30:19 AM	Tube furnace set to 0
1/7/2011	1:30:19 AM	Run finished at 1:30 AM
1/7/2011	1:30:19 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	3:09:59 AM	Recipe started at 3:09 AM
1/7/2011	3:09:59 AM	Helium valve closed
1/7/2011	3:09:59 AM	BCl3 valve closed
1/7/2011	3:09:59 AM	PH3 valve closed
1/7/2011	3:09:59 AM	SiCl4 pre valve closed
1/7/2011	3:09:59 AM	SiCl4 post valve closed
1/7/2011	3:09:59 AM	Main Vac valve closed
1/7/2011	3:09:59 AM	Bypass valve closed
1/7/2011	3:09:59 AM	Bubbler valve closed
1/7/2011	3:09:59 AM	H2 valve opened
1/7/2011	3:09:59 AM	Helium MFC set to  0.000000
1/7/2011	3:09:59 AM	H2 MFC set to  500.000000
1/7/2011	3:09:59 AM	BCl3 MFC set to  0.000000
1/7/2011	3:09:59 AM	PHl3 MFC set to  0.000000
1/7/2011	3:09:59 AM	SiCl4 MFC set to  0.000000
1/7/2011	3:09:59 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:10:00 AM	Tube furnace set to 0
1/7/2011	3:11:19 AM	Helium valve closed
1/7/2011	3:11:19 AM	BCl3 valve closed
1/7/2011	3:11:19 AM	PH3 valve closed
1/7/2011	3:11:19 AM	SiCl4 pre valve closed
1/7/2011	3:11:19 AM	SiCl4 post valve closed
1/7/2011	3:11:19 AM	Main Vac valve closed
1/7/2011	3:11:19 AM	Bypass valve closed
1/7/2011	3:11:19 AM	H2 valve opened
1/7/2011	3:11:19 AM	Bubbler valve opened
1/7/2011	3:11:19 AM	Helium MFC set to  0.000000
1/7/2011	3:11:19 AM	H2 MFC set to  500.000000
1/7/2011	3:11:19 AM	BCl3 MFC set to  0.000000
1/7/2011	3:11:19 AM	PHl3 MFC set to  0.000000
1/7/2011	3:11:19 AM	SiCl4 MFC set to  0.000000
1/7/2011	3:11:19 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:11:19 AM	Tube furnace set to 1000
1/7/2011	3:31:19 AM	Helium valve closed
1/7/2011	3:31:19 AM	PH3 valve closed
1/7/2011	3:31:19 AM	Main Vac valve closed
1/7/2011	3:31:19 AM	Bypass valve closed
1/7/2011	3:31:19 AM	H2 valve opened
1/7/2011	3:31:19 AM	BCl3 valve opened
1/7/2011	3:31:19 AM	SiCl4 pre valve opened
1/7/2011	3:31:19 AM	SiCl4 post valve opened
1/7/2011	3:31:19 AM	Bubbler valve opened
1/7/2011	3:31:19 AM	Helium MFC set to  0.000000
1/7/2011	3:31:19 AM	H2 MFC set to  500.000000
1/7/2011	3:31:19 AM	BCl3 MFC set to  1.800000
1/7/2011	3:31:19 AM	PHl3 MFC set to  0.000000
1/7/2011	3:31:19 AM	SiCl4 MFC set to  50.000000
1/7/2011	3:31:19 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:31:19 AM	Tube furnace set to 1000
1/7/2011	3:46:19 AM	H2 valve closed
1/7/2011	3:46:19 AM	BCl3 valve closed
1/7/2011	3:46:19 AM	PH3 valve closed
1/7/2011	3:46:19 AM	SiCl4 pre valve closed
1/7/2011	3:46:19 AM	SiCl4 post valve closed
1/7/2011	3:46:19 AM	Main Vac valve closed
1/7/2011	3:46:19 AM	Bypass valve closed
1/7/2011	3:46:19 AM	Helium valve opened
1/7/2011	3:46:19 AM	Bubbler valve opened
1/7/2011	3:46:19 AM	Helium MFC set to  500.000000
1/7/2011	3:46:19 AM	H2 MFC set to  0.000000
1/7/2011	3:46:19 AM	BCl3 MFC set to  0.000000
1/7/2011	3:46:19 AM	PHl3 MFC set to  0.000000
1/7/2011	3:46:19 AM	SiCl4 MFC set to  0.000000
1/7/2011	3:46:19 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:46:19 AM	Tube furnace set to 0
1/7/2011	4:06:19 AM	Helium valve closed
1/7/2011	4:06:19 AM	H2 valve closed
1/7/2011	4:06:19 AM	BCl3 valve closed
1/7/2011	4:06:19 AM	PH3 valve closed
1/7/2011	4:06:19 AM	SiCl4 pre valve closed
1/7/2011	4:06:19 AM	SiCl4 post valve closed
1/7/2011	4:06:19 AM	Main Vac valve closed
1/7/2011	4:06:19 AM	Bypass valve closed
1/7/2011	4:06:19 AM	Bubbler valve closed
1/7/2011	4:06:19 AM	Helium MFC set to  0.000000
1/7/2011	4:06:19 AM	H2 MFC set to  0.000000
1/7/2011	4:06:19 AM	BCl3 MFC set to  0.000000
1/7/2011	4:06:19 AM	PHl3 MFC set to  0.000000
1/7/2011	4:06:19 AM	SiCl4 MFC set to  0.000000
1/7/2011	4:06:19 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:06:19 AM	Tube furnace set to 0
1/7/2011	4:06:20 AM	Run finished at 4:06 AM
1/7/2011	4:10:00 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	4:10:00 AM	Recipe started at 4:10 AM
1/7/2011	4:10:00 AM	Helium valve closed
1/7/2011	4:10:00 AM	H2 valve closed
1/7/2011	4:10:00 AM	BCl3 valve closed
1/7/2011	4:10:00 AM	PH3 valve closed
1/7/2011	4:10:00 AM	SiCl4 pre valve closed
1/7/2011	4:10:00 AM	SiCl4 post valve closed
1/7/2011	4:10:00 AM	Main Vac valve closed
1/7/2011	4:10:00 AM	Bubbler valve closed
1/7/2011	4:10:00 AM	Bypass valve opened
1/7/2011	4:10:00 AM	Helium MFC set to  0.000000
1/7/2011	4:10:00 AM	H2 MFC set to  0.000000
1/7/2011	4:10:00 AM	BCl3 MFC set to  0.000000
1/7/2011	4:10:00 AM	PHl3 MFC set to  0.000000
1/7/2011	4:10:00 AM	SiCl4 MFC set to  0.000000
1/7/2011	4:10:00 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:10:00 AM	Tube furnace set to 0
1/7/2011	4:10:55 AM	Helium valve closed
1/7/2011	4:10:55 AM	H2 valve closed
1/7/2011	4:10:55 AM	BCl3 valve closed
1/7/2011	4:10:55 AM	PH3 valve closed
1/7/2011	4:10:55 AM	SiCl4 pre valve closed
1/7/2011	4:10:55 AM	SiCl4 post valve closed
1/7/2011	4:10:55 AM	Bubbler valve closed
1/7/2011	4:10:55 AM	Main Vac valve opened
1/7/2011	4:10:55 AM	Bypass valve opened
1/7/2011	4:10:55 AM	Helium MFC set to  0.000000
1/7/2011	4:10:55 AM	H2 MFC set to  0.000000
1/7/2011	4:10:55 AM	BCl3 MFC set to  0.000000
1/7/2011	4:10:55 AM	PHl3 MFC set to  0.000000
1/7/2011	4:10:55 AM	SiCl4 MFC set to  0.000000
1/7/2011	4:10:55 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:10:55 AM	Tube furnace set to 0
1/7/2011	4:10:55 AM	Run finished at 4:10 AM
1/7/2011	4:10:55 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	9:33:28 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	9:33:29 AM	Recipe started at 9:33 AM
1/7/2011	9:33:29 AM	H2 valve closed
1/7/2011	9:33:29 AM	BCl3 valve closed
1/7/2011	9:33:29 AM	PH3 valve closed
1/7/2011	9:33:29 AM	SiCl4 pre valve closed
1/7/2011	9:33:29 AM	SiCl4 post valve closed
1/7/2011	9:33:29 AM	Main Vac valve closed
1/7/2011	9:33:29 AM	Bypass valve closed
1/7/2011	9:33:29 AM	Bubbler valve closed
1/7/2011	9:33:29 AM	Helium valve opened
1/7/2011	9:33:29 AM	Helium MFC set to  500.000000
1/7/2011	9:33:29 AM	H2 MFC set to  0.000000
1/7/2011	9:33:29 AM	BCl3 MFC set to  0.000000
1/7/2011	9:33:29 AM	PHl3 MFC set to  0.000000
1/7/2011	9:33:29 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:33:29 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:33:29 AM	Tube furnace set to 0
1/7/2011	9:34:48 AM	Helium valve closed
1/7/2011	9:34:48 AM	H2 valve closed
1/7/2011	9:34:48 AM	BCl3 valve closed
1/7/2011	9:34:48 AM	PH3 valve closed
1/7/2011	9:34:48 AM	SiCl4 pre valve closed
1/7/2011	9:34:48 AM	SiCl4 post valve closed
1/7/2011	9:34:48 AM	Main Vac valve closed
1/7/2011	9:34:48 AM	Bypass valve closed
1/7/2011	9:34:48 AM	Bubbler valve closed
1/7/2011	9:34:48 AM	Helium MFC set to  0.000000
1/7/2011	9:34:48 AM	H2 MFC set to  0.000000
1/7/2011	9:34:48 AM	BCl3 MFC set to  0.000000
1/7/2011	9:34:48 AM	PHl3 MFC set to  0.000000
1/7/2011	9:34:48 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:34:48 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:34:48 AM	Tube furnace set to 0
1/7/2011	9:34:48 AM	Run finished at 9:34 AM
1/7/2011	9:34:48 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	9:43:02 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	9:43:02 AM	Recipe started at 9:43 AM
1/7/2011	9:43:02 AM	Helium valve closed
1/7/2011	9:43:02 AM	H2 valve closed
1/7/2011	9:43:02 AM	BCl3 valve closed
1/7/2011	9:43:02 AM	PH3 valve closed
1/7/2011	9:43:02 AM	SiCl4 pre valve closed
1/7/2011	9:43:02 AM	SiCl4 post valve closed
1/7/2011	9:43:02 AM	Main Vac valve closed
1/7/2011	9:43:02 AM	Bubbler valve closed
1/7/2011	9:43:02 AM	Bypass valve opened
1/7/2011	9:43:02 AM	Helium MFC set to  0.000000
1/7/2011	9:43:02 AM	H2 MFC set to  0.000000
1/7/2011	9:43:02 AM	BCl3 MFC set to  0.000000
1/7/2011	9:43:02 AM	PHl3 MFC set to  0.000000
1/7/2011	9:43:02 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:43:02 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:43:03 AM	Tube furnace set to 0
1/7/2011	9:44:03 AM	Helium valve closed
1/7/2011	9:44:03 AM	H2 valve closed
1/7/2011	9:44:03 AM	BCl3 valve closed
1/7/2011	9:44:03 AM	PH3 valve closed
1/7/2011	9:44:03 AM	SiCl4 pre valve closed
1/7/2011	9:44:03 AM	SiCl4 post valve closed
1/7/2011	9:44:03 AM	Bubbler valve closed
1/7/2011	9:44:03 AM	Main Vac valve opened
1/7/2011	9:44:03 AM	Bypass valve opened
1/7/2011	9:44:03 AM	Helium MFC set to  0.000000
1/7/2011	9:44:03 AM	H2 MFC set to  0.000000
1/7/2011	9:44:03 AM	BCl3 MFC set to  0.000000
1/7/2011	9:44:03 AM	PHl3 MFC set to  0.000000
1/7/2011	9:44:03 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:44:03 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:44:03 AM	Tube furnace set to 0
1/7/2011	9:44:03 AM	Run finished at 9:44 AM
1/7/2011	9:44:03 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	9:44:43 AM	Tube furnace set to 200
1/7/2011	9:46:24 AM	Bypass valve closed
1/7/2011	9:46:26 AM	Main Vac valve closed
1/7/2011	9:46:35 AM	Main Vac valve opened
1/7/2011	9:46:38 AM	Bypass valve opened
1/7/2011	9:53:48 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	9:54:01 AM	Recipe started at 9:53 AM
1/7/2011	9:54:01 AM	Helium valve closed
1/7/2011	9:54:01 AM	H2 valve closed
1/7/2011	9:54:01 AM	BCl3 valve closed
1/7/2011	9:54:01 AM	PH3 valve closed
1/7/2011	9:54:01 AM	SiCl4 pre valve closed
1/7/2011	9:54:01 AM	SiCl4 post valve closed
1/7/2011	9:54:01 AM	Main Vac valve closed
1/7/2011	9:54:01 AM	Bubbler valve closed
1/7/2011	9:54:01 AM	Bypass valve opened
1/7/2011	9:54:01 AM	Helium MFC set to  0.000000
1/7/2011	9:54:01 AM	H2 MFC set to  0.000000
1/7/2011	9:54:01 AM	BCl3 MFC set to  0.000000
1/7/2011	9:54:01 AM	PHl3 MFC set to  0.000000
1/7/2011	9:54:01 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:54:01 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:54:01 AM	Tube furnace set to 0
1/7/2011	9:54:01 AM	Helium valve closed
1/7/2011	9:54:01 AM	H2 valve closed
1/7/2011	9:54:01 AM	BCl3 valve closed
1/7/2011	9:54:01 AM	PH3 valve closed
1/7/2011	9:54:01 AM	SiCl4 pre valve closed
1/7/2011	9:54:01 AM	SiCl4 post valve closed
1/7/2011	9:54:01 AM	Bubbler valve closed
1/7/2011	9:54:01 AM	Main Vac valve opened
1/7/2011	9:54:01 AM	Bypass valve opened
1/7/2011	9:54:01 AM	Helium MFC set to  0.000000
1/7/2011	9:54:01 AM	H2 MFC set to  0.000000
1/7/2011	9:54:01 AM	BCl3 MFC set to  0.000000
1/7/2011	9:54:01 AM	PHl3 MFC set to  0.000000
1/7/2011	9:54:01 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:54:01 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:54:01 AM	Tube furnace set to 0
1/7/2011	9:55:01 AM	H2 valve closed
1/7/2011	9:55:01 AM	BCl3 valve closed
1/7/2011	9:55:01 AM	PH3 valve closed
1/7/2011	9:55:01 AM	SiCl4 pre valve closed
1/7/2011	9:55:01 AM	SiCl4 post valve closed
1/7/2011	9:55:01 AM	Bubbler valve closed
1/7/2011	9:55:01 AM	Helium valve opened
1/7/2011	9:55:01 AM	Main Vac valve opened
1/7/2011	9:55:01 AM	Bypass valve opened
1/7/2011	9:55:01 AM	Helium MFC set to  100.000000
1/7/2011	9:55:01 AM	H2 MFC set to  0.000000
1/7/2011	9:55:01 AM	BCl3 MFC set to  0.000000
1/7/2011	9:55:01 AM	PHl3 MFC set to  0.000000
1/7/2011	9:55:01 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:55:01 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:55:02 AM	Tube furnace set to 0
1/7/2011	9:56:02 AM	Helium valve closed
1/7/2011	9:56:02 AM	H2 valve closed
1/7/2011	9:56:02 AM	BCl3 valve closed
1/7/2011	9:56:02 AM	PH3 valve closed
1/7/2011	9:56:02 AM	SiCl4 pre valve closed
1/7/2011	9:56:02 AM	SiCl4 post valve closed
1/7/2011	9:56:02 AM	Bubbler valve closed
1/7/2011	9:56:02 AM	Main Vac valve opened
1/7/2011	9:56:02 AM	Bypass valve opened
1/7/2011	9:56:02 AM	Helium MFC set to  0.000000
1/7/2011	9:56:02 AM	H2 MFC set to  0.000000
1/7/2011	9:56:02 AM	BCl3 MFC set to  0.000000
1/7/2011	9:56:02 AM	PHl3 MFC set to  0.000000
1/7/2011	9:56:02 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:56:02 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:56:02 AM	Tube furnace set to 0
1/7/2011	9:57:02 AM	H2 valve closed
1/7/2011	9:57:02 AM	BCl3 valve closed
1/7/2011	9:57:02 AM	PH3 valve closed
1/7/2011	9:57:02 AM	SiCl4 pre valve closed
1/7/2011	9:57:02 AM	SiCl4 post valve closed
1/7/2011	9:57:02 AM	Bubbler valve closed
1/7/2011	9:57:02 AM	Helium valve opened
1/7/2011	9:57:02 AM	Main Vac valve opened
1/7/2011	9:57:02 AM	Bypass valve opened
1/7/2011	9:57:02 AM	Helium MFC set to  100.000000
1/7/2011	9:57:02 AM	H2 MFC set to  0.000000
1/7/2011	9:57:02 AM	BCl3 MFC set to  0.000000
1/7/2011	9:57:02 AM	PHl3 MFC set to  0.000000
1/7/2011	9:57:02 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:57:02 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:57:02 AM	Tube furnace set to 0
1/7/2011	9:58:02 AM	Helium valve closed
1/7/2011	9:58:02 AM	H2 valve closed
1/7/2011	9:58:02 AM	BCl3 valve closed
1/7/2011	9:58:02 AM	PH3 valve closed
1/7/2011	9:58:02 AM	SiCl4 pre valve closed
1/7/2011	9:58:02 AM	SiCl4 post valve closed
1/7/2011	9:58:02 AM	Bubbler valve closed
1/7/2011	9:58:02 AM	Main Vac valve opened
1/7/2011	9:58:02 AM	Bypass valve opened
1/7/2011	9:58:02 AM	Helium MFC set to  0.000000
1/7/2011	9:58:02 AM	H2 MFC set to  0.000000
1/7/2011	9:58:02 AM	BCl3 MFC set to  0.000000
1/7/2011	9:58:02 AM	PHl3 MFC set to  0.000000
1/7/2011	9:58:02 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:58:02 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:58:02 AM	Tube furnace set to 0
1/7/2011	9:59:02 AM	H2 valve closed
1/7/2011	9:59:02 AM	BCl3 valve closed
1/7/2011	9:59:02 AM	PH3 valve closed
1/7/2011	9:59:02 AM	SiCl4 pre valve closed
1/7/2011	9:59:02 AM	SiCl4 post valve closed
1/7/2011	9:59:02 AM	Bubbler valve closed
1/7/2011	9:59:02 AM	Helium valve opened
1/7/2011	9:59:02 AM	Main Vac valve opened
1/7/2011	9:59:02 AM	Bypass valve opened
1/7/2011	9:59:02 AM	Helium MFC set to  100.000000
1/7/2011	9:59:02 AM	H2 MFC set to  0.000000
1/7/2011	9:59:02 AM	BCl3 MFC set to  0.000000
1/7/2011	9:59:02 AM	PHl3 MFC set to  0.000000
1/7/2011	9:59:02 AM	SiCl4 MFC set to  0.000000
1/7/2011	9:59:02 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	9:59:02 AM	Tube furnace set to 0
1/7/2011	10:00:02 AM	Helium valve closed
1/7/2011	10:00:02 AM	H2 valve closed
1/7/2011	10:00:02 AM	BCl3 valve closed
1/7/2011	10:00:02 AM	PH3 valve closed
1/7/2011	10:00:02 AM	SiCl4 pre valve closed
1/7/2011	10:00:02 AM	SiCl4 post valve closed
1/7/2011	10:00:02 AM	Bubbler valve closed
1/7/2011	10:00:02 AM	Main Vac valve opened
1/7/2011	10:00:02 AM	Bypass valve opened
1/7/2011	10:00:02 AM	Helium MFC set to  0.000000
1/7/2011	10:00:02 AM	H2 MFC set to  0.000000
1/7/2011	10:00:02 AM	BCl3 MFC set to  0.000000
1/7/2011	10:00:02 AM	PHl3 MFC set to  0.000000
1/7/2011	10:00:02 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:00:03 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:00:03 AM	Tube furnace set to 0
1/7/2011	10:01:03 AM	H2 valve closed
1/7/2011	10:01:03 AM	BCl3 valve closed
1/7/2011	10:01:03 AM	PH3 valve closed
1/7/2011	10:01:03 AM	SiCl4 pre valve closed
1/7/2011	10:01:03 AM	SiCl4 post valve closed
1/7/2011	10:01:03 AM	Bubbler valve closed
1/7/2011	10:01:03 AM	Helium valve opened
1/7/2011	10:01:03 AM	Main Vac valve opened
1/7/2011	10:01:03 AM	Bypass valve opened
1/7/2011	10:01:03 AM	Helium MFC set to  100.000000
1/7/2011	10:01:03 AM	H2 MFC set to  0.000000
1/7/2011	10:01:03 AM	BCl3 MFC set to  0.000000
1/7/2011	10:01:03 AM	PHl3 MFC set to  0.000000
1/7/2011	10:01:03 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:01:03 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:01:03 AM	Tube furnace set to 0
1/7/2011	10:02:03 AM	Helium valve closed
1/7/2011	10:02:03 AM	H2 valve closed
1/7/2011	10:02:03 AM	BCl3 valve closed
1/7/2011	10:02:03 AM	PH3 valve closed
1/7/2011	10:02:03 AM	SiCl4 pre valve closed
1/7/2011	10:02:03 AM	SiCl4 post valve closed
1/7/2011	10:02:03 AM	Bubbler valve closed
1/7/2011	10:02:03 AM	Main Vac valve opened
1/7/2011	10:02:03 AM	Bypass valve opened
1/7/2011	10:02:03 AM	Helium MFC set to  0.000000
1/7/2011	10:02:03 AM	H2 MFC set to  0.000000
1/7/2011	10:02:03 AM	BCl3 MFC set to  0.000000
1/7/2011	10:02:03 AM	PHl3 MFC set to  0.000000
1/7/2011	10:02:03 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:02:03 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:02:03 AM	Tube furnace set to 0
1/7/2011	10:03:03 AM	H2 valve closed
1/7/2011	10:03:03 AM	BCl3 valve closed
1/7/2011	10:03:03 AM	PH3 valve closed
1/7/2011	10:03:03 AM	SiCl4 pre valve closed
1/7/2011	10:03:03 AM	SiCl4 post valve closed
1/7/2011	10:03:03 AM	Bubbler valve closed
1/7/2011	10:03:03 AM	Helium valve opened
1/7/2011	10:03:03 AM	Main Vac valve opened
1/7/2011	10:03:03 AM	Bypass valve opened
1/7/2011	10:03:03 AM	Helium MFC set to  100.000000
1/7/2011	10:03:03 AM	H2 MFC set to  0.000000
1/7/2011	10:03:03 AM	BCl3 MFC set to  0.000000
1/7/2011	10:03:03 AM	PHl3 MFC set to  0.000000
1/7/2011	10:03:03 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:03:03 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:03:03 AM	Tube furnace set to 0
1/7/2011	10:04:03 AM	Helium valve closed
1/7/2011	10:04:03 AM	H2 valve closed
1/7/2011	10:04:03 AM	BCl3 valve closed
1/7/2011	10:04:03 AM	PH3 valve closed
1/7/2011	10:04:03 AM	SiCl4 pre valve closed
1/7/2011	10:04:03 AM	SiCl4 post valve closed
1/7/2011	10:04:03 AM	Bubbler valve closed
1/7/2011	10:04:03 AM	Main Vac valve opened
1/7/2011	10:04:03 AM	Bypass valve opened
1/7/2011	10:04:03 AM	Helium MFC set to  0.000000
1/7/2011	10:04:03 AM	H2 MFC set to  0.000000
1/7/2011	10:04:03 AM	BCl3 MFC set to  0.000000
1/7/2011	10:04:03 AM	PHl3 MFC set to  0.000000
1/7/2011	10:04:03 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:04:03 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:04:03 AM	Tube furnace set to 0
1/7/2011	10:05:03 AM	H2 valve closed
1/7/2011	10:05:03 AM	BCl3 valve closed
1/7/2011	10:05:03 AM	PH3 valve closed
1/7/2011	10:05:04 AM	SiCl4 pre valve closed
1/7/2011	10:05:04 AM	SiCl4 post valve closed
1/7/2011	10:05:04 AM	Bubbler valve closed
1/7/2011	10:05:04 AM	Helium valve opened
1/7/2011	10:05:04 AM	Main Vac valve opened
1/7/2011	10:05:04 AM	Bypass valve opened
1/7/2011	10:05:04 AM	Helium MFC set to  100.000000
1/7/2011	10:05:04 AM	H2 MFC set to  0.000000
1/7/2011	10:05:04 AM	BCl3 MFC set to  0.000000
1/7/2011	10:05:04 AM	PHl3 MFC set to  0.000000
1/7/2011	10:05:04 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:05:04 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:05:04 AM	Tube furnace set to 0
1/7/2011	10:06:04 AM	Helium valve closed
1/7/2011	10:06:04 AM	H2 valve closed
1/7/2011	10:06:04 AM	BCl3 valve closed
1/7/2011	10:06:04 AM	PH3 valve closed
1/7/2011	10:06:04 AM	SiCl4 pre valve closed
1/7/2011	10:06:04 AM	SiCl4 post valve closed
1/7/2011	10:06:04 AM	Bubbler valve closed
1/7/2011	10:06:04 AM	Main Vac valve opened
1/7/2011	10:06:04 AM	Bypass valve opened
1/7/2011	10:06:04 AM	Helium MFC set to  0.000000
1/7/2011	10:06:04 AM	H2 MFC set to  0.000000
1/7/2011	10:06:04 AM	BCl3 MFC set to  0.000000
1/7/2011	10:06:04 AM	PHl3 MFC set to  0.000000
1/7/2011	10:06:04 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:06:04 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:06:04 AM	Tube furnace set to 0
1/7/2011	10:07:04 AM	H2 valve closed
1/7/2011	10:07:04 AM	BCl3 valve closed
1/7/2011	10:07:04 AM	PH3 valve closed
1/7/2011	10:07:04 AM	SiCl4 pre valve closed
1/7/2011	10:07:04 AM	SiCl4 post valve closed
1/7/2011	10:07:04 AM	Bubbler valve closed
1/7/2011	10:07:04 AM	Helium valve opened
1/7/2011	10:07:04 AM	Main Vac valve opened
1/7/2011	10:07:04 AM	Bypass valve opened
1/7/2011	10:07:04 AM	Helium MFC set to  100.000000
1/7/2011	10:07:04 AM	H2 MFC set to  0.000000
1/7/2011	10:07:04 AM	BCl3 MFC set to  0.000000
1/7/2011	10:07:04 AM	PHl3 MFC set to  0.000000
1/7/2011	10:07:04 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:07:04 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:07:04 AM	Tube furnace set to 0
1/7/2011	10:08:04 AM	Helium valve closed
1/7/2011	10:08:04 AM	H2 valve closed
1/7/2011	10:08:04 AM	BCl3 valve closed
1/7/2011	10:08:04 AM	PH3 valve closed
1/7/2011	10:08:04 AM	SiCl4 pre valve closed
1/7/2011	10:08:04 AM	SiCl4 post valve closed
1/7/2011	10:08:04 AM	Bubbler valve closed
1/7/2011	10:08:04 AM	Main Vac valve opened
1/7/2011	10:08:04 AM	Bypass valve opened
1/7/2011	10:08:04 AM	Helium MFC set to  0.000000
1/7/2011	10:08:04 AM	H2 MFC set to  0.000000
1/7/2011	10:08:04 AM	BCl3 MFC set to  0.000000
1/7/2011	10:08:04 AM	PHl3 MFC set to  0.000000
1/7/2011	10:08:04 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:08:04 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:08:04 AM	Tube furnace set to 0
1/7/2011	10:09:04 AM	H2 valve closed
1/7/2011	10:09:04 AM	BCl3 valve closed
1/7/2011	10:09:04 AM	PH3 valve closed
1/7/2011	10:09:04 AM	SiCl4 pre valve closed
1/7/2011	10:09:04 AM	SiCl4 post valve closed
1/7/2011	10:09:04 AM	Bubbler valve closed
1/7/2011	10:09:04 AM	Helium valve opened
1/7/2011	10:09:04 AM	Main Vac valve opened
1/7/2011	10:09:04 AM	Bypass valve opened
1/7/2011	10:09:04 AM	Helium MFC set to  100.000000
1/7/2011	10:09:04 AM	H2 MFC set to  0.000000
1/7/2011	10:09:04 AM	BCl3 MFC set to  0.000000
1/7/2011	10:09:04 AM	PHl3 MFC set to  0.000000
1/7/2011	10:09:04 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:09:04 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:09:04 AM	Tube furnace set to 0
1/7/2011	10:10:05 AM	Helium valve closed
1/7/2011	10:10:05 AM	H2 valve closed
1/7/2011	10:10:05 AM	BCl3 valve closed
1/7/2011	10:10:05 AM	PH3 valve closed
1/7/2011	10:10:05 AM	SiCl4 pre valve closed
1/7/2011	10:10:05 AM	SiCl4 post valve closed
1/7/2011	10:10:05 AM	Bubbler valve closed
1/7/2011	10:10:05 AM	Main Vac valve opened
1/7/2011	10:10:05 AM	Bypass valve opened
1/7/2011	10:10:05 AM	Helium MFC set to  0.000000
1/7/2011	10:10:05 AM	H2 MFC set to  0.000000
1/7/2011	10:10:05 AM	BCl3 MFC set to  0.000000
1/7/2011	10:10:05 AM	PHl3 MFC set to  0.000000
1/7/2011	10:10:05 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:10:05 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:10:05 AM	Tube furnace set to 0
1/7/2011	10:11:05 AM	H2 valve closed
1/7/2011	10:11:05 AM	BCl3 valve closed
1/7/2011	10:11:05 AM	PH3 valve closed
1/7/2011	10:11:05 AM	SiCl4 pre valve closed
1/7/2011	10:11:05 AM	SiCl4 post valve closed
1/7/2011	10:11:05 AM	Bubbler valve closed
1/7/2011	10:11:05 AM	Helium valve opened
1/7/2011	10:11:05 AM	Main Vac valve opened
1/7/2011	10:11:05 AM	Bypass valve opened
1/7/2011	10:11:05 AM	Helium MFC set to  100.000000
1/7/2011	10:11:05 AM	H2 MFC set to  0.000000
1/7/2011	10:11:05 AM	BCl3 MFC set to  0.000000
1/7/2011	10:11:05 AM	PHl3 MFC set to  0.000000
1/7/2011	10:11:05 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:11:05 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:11:05 AM	Tube furnace set to 0
1/7/2011	10:12:05 AM	Helium valve closed
1/7/2011	10:12:05 AM	H2 valve closed
1/7/2011	10:12:05 AM	BCl3 valve closed
1/7/2011	10:12:05 AM	PH3 valve closed
1/7/2011	10:12:05 AM	SiCl4 pre valve closed
1/7/2011	10:12:05 AM	SiCl4 post valve closed
1/7/2011	10:12:05 AM	Bubbler valve closed
1/7/2011	10:12:05 AM	Main Vac valve opened
1/7/2011	10:12:05 AM	Bypass valve opened
1/7/2011	10:12:05 AM	Helium MFC set to  0.000000
1/7/2011	10:12:05 AM	H2 MFC set to  0.000000
1/7/2011	10:12:05 AM	BCl3 MFC set to  0.000000
1/7/2011	10:12:05 AM	PHl3 MFC set to  0.000000
1/7/2011	10:12:05 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:12:05 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:12:05 AM	Tube furnace set to 0
1/7/2011	10:13:05 AM	H2 valve closed
1/7/2011	10:13:05 AM	BCl3 valve closed
1/7/2011	10:13:05 AM	PH3 valve closed
1/7/2011	10:13:05 AM	SiCl4 pre valve closed
1/7/2011	10:13:05 AM	SiCl4 post valve closed
1/7/2011	10:13:05 AM	Bubbler valve closed
1/7/2011	10:13:05 AM	Helium valve opened
1/7/2011	10:13:05 AM	Main Vac valve opened
1/7/2011	10:13:05 AM	Bypass valve opened
1/7/2011	10:13:05 AM	Helium MFC set to  100.000000
1/7/2011	10:13:05 AM	H2 MFC set to  0.000000
1/7/2011	10:13:05 AM	BCl3 MFC set to  0.000000
1/7/2011	10:13:05 AM	PHl3 MFC set to  0.000000
1/7/2011	10:13:05 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:13:05 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:13:05 AM	Tube furnace set to 0
1/7/2011	10:14:05 AM	Helium valve closed
1/7/2011	10:14:05 AM	H2 valve closed
1/7/2011	10:14:05 AM	BCl3 valve closed
1/7/2011	10:14:05 AM	PH3 valve closed
1/7/2011	10:14:05 AM	SiCl4 pre valve closed
1/7/2011	10:14:05 AM	SiCl4 post valve closed
1/7/2011	10:14:05 AM	Bubbler valve closed
1/7/2011	10:14:05 AM	Main Vac valve opened
1/7/2011	10:14:05 AM	Bypass valve opened
1/7/2011	10:14:05 AM	Helium MFC set to  0.000000
1/7/2011	10:14:05 AM	H2 MFC set to  0.000000
1/7/2011	10:14:05 AM	BCl3 MFC set to  0.000000
1/7/2011	10:14:05 AM	PHl3 MFC set to  0.000000
1/7/2011	10:14:05 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:14:05 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:14:06 AM	Tube furnace set to 0
1/7/2011	10:14:07 AM	Run finished at 10:14 AM
1/7/2011	10:14:07 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	10:32:30 AM	Bypass valve closed
1/7/2011	10:32:30 AM	Main Vac valve closed
1/7/2011	10:32:32 AM	Helium valve opened
1/7/2011	10:32:33 AM	Helium valve closed
1/7/2011	10:32:39 AM	Helium MFC set to  10.000000
1/7/2011	10:32:40 AM	Helium valve opened
1/7/2011	10:32:48 AM	Helium valve closed
1/7/2011	10:32:54 AM	Helium MFC set to  0.000000
1/7/2011	10:32:55 AM	Helium valve opened
1/7/2011	10:32:57 AM	Helium valve closed
1/7/2011	10:33:01 AM	Main Vac valve opened
1/7/2011	10:33:02 AM	Bypass valve opened
1/7/2011	10:42:00 AM	Recipe started at 10:41 AM
1/7/2011	10:42:00 AM	Helium valve closed
1/7/2011	10:42:00 AM	BCl3 valve closed
1/7/2011	10:42:00 AM	PH3 valve closed
1/7/2011	10:42:00 AM	SiCl4 pre valve closed
1/7/2011	10:42:00 AM	SiCl4 post valve closed
1/7/2011	10:42:00 AM	Main Vac valve closed
1/7/2011	10:42:00 AM	Bypass valve closed
1/7/2011	10:42:00 AM	Bubbler valve closed
1/7/2011	10:42:00 AM	H2 valve opened
1/7/2011	10:42:00 AM	Helium MFC set to  0.000000
1/7/2011	10:42:00 AM	H2 MFC set to  500.000000
1/7/2011	10:42:00 AM	BCl3 MFC set to  0.000000
1/7/2011	10:42:00 AM	PHl3 MFC set to  0.000000
1/7/2011	10:42:00 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:42:00 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:42:00 AM	Tube furnace set to 0
1/7/2011	10:43:20 AM	Helium valve closed
1/7/2011	10:43:20 AM	BCl3 valve closed
1/7/2011	10:43:20 AM	PH3 valve closed
1/7/2011	10:43:20 AM	SiCl4 pre valve closed
1/7/2011	10:43:20 AM	SiCl4 post valve closed
1/7/2011	10:43:20 AM	Main Vac valve closed
1/7/2011	10:43:20 AM	Bypass valve closed
1/7/2011	10:43:20 AM	H2 valve opened
1/7/2011	10:43:20 AM	Bubbler valve opened
1/7/2011	10:43:20 AM	Helium MFC set to  0.000000
1/7/2011	10:43:20 AM	H2 MFC set to  500.000000
1/7/2011	10:43:20 AM	BCl3 MFC set to  0.000000
1/7/2011	10:43:20 AM	PHl3 MFC set to  0.000000
1/7/2011	10:43:20 AM	SiCl4 MFC set to  0.000000
1/7/2011	10:43:20 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	10:43:20 AM	Tube furnace set to 1000
1/7/2011	11:03:20 AM	Helium valve closed
1/7/2011	11:03:20 AM	PH3 valve closed
1/7/2011	11:03:20 AM	Main Vac valve closed
1/7/2011	11:03:20 AM	Bypass valve closed
1/7/2011	11:03:20 AM	H2 valve opened
1/7/2011	11:03:20 AM	BCl3 valve opened
1/7/2011	11:03:20 AM	SiCl4 pre valve opened
1/7/2011	11:03:20 AM	SiCl4 post valve opened
1/7/2011	11:03:20 AM	Bubbler valve opened
1/7/2011	11:03:20 AM	Helium MFC set to  0.000000
1/7/2011	11:03:20 AM	H2 MFC set to  500.000000
1/7/2011	11:03:20 AM	BCl3 MFC set to  1.800000
1/7/2011	11:03:20 AM	PHl3 MFC set to  0.000000
1/7/2011	11:03:20 AM	SiCl4 MFC set to  50.000000
1/7/2011	11:03:20 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	11:03:21 AM	Tube furnace set to 1000
1/7/2011	11:18:21 AM	H2 valve closed
1/7/2011	11:18:21 AM	BCl3 valve closed
1/7/2011	11:18:21 AM	PH3 valve closed
1/7/2011	11:18:21 AM	SiCl4 pre valve closed
1/7/2011	11:18:21 AM	SiCl4 post valve closed
1/7/2011	11:18:21 AM	Main Vac valve closed
1/7/2011	11:18:21 AM	Bypass valve closed
1/7/2011	11:18:21 AM	Helium valve opened
1/7/2011	11:18:21 AM	Bubbler valve opened
1/7/2011	11:18:21 AM	Helium MFC set to  500.000000
1/7/2011	11:18:21 AM	H2 MFC set to  0.000000
1/7/2011	11:18:21 AM	BCl3 MFC set to  0.000000
1/7/2011	11:18:21 AM	PHl3 MFC set to  0.000000
1/7/2011	11:18:21 AM	SiCl4 MFC set to  0.000000
1/7/2011	11:18:21 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	11:18:21 AM	Tube furnace set to 0
1/7/2011	11:38:21 AM	Helium valve closed
1/7/2011	11:38:21 AM	H2 valve closed
1/7/2011	11:38:21 AM	BCl3 valve closed
1/7/2011	11:38:21 AM	PH3 valve closed
1/7/2011	11:38:21 AM	SiCl4 pre valve closed
1/7/2011	11:38:21 AM	SiCl4 post valve closed
1/7/2011	11:38:21 AM	Main Vac valve closed
1/7/2011	11:38:21 AM	Bypass valve closed
1/7/2011	11:38:21 AM	Bubbler valve closed
1/7/2011	11:38:21 AM	Helium MFC set to  0.000000
1/7/2011	11:38:21 AM	H2 MFC set to  0.000000
1/7/2011	11:38:21 AM	BCl3 MFC set to  0.000000
1/7/2011	11:38:21 AM	PHl3 MFC set to  0.000000
1/7/2011	11:38:21 AM	SiCl4 MFC set to  0.000000
1/7/2011	11:38:21 AM	Bypass solenoid MFC set to  0.000000
1/7/2011	11:38:21 AM	Tube furnace set to 0
1/7/2011	11:38:21 AM	Run finished at 11:38 AM
1/7/2011	12:11:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	12:11:15 PM	Recipe started at 12:11 PM
1/7/2011	12:11:15 PM	H2 valve closed
1/7/2011	12:11:15 PM	BCl3 valve closed
1/7/2011	12:11:15 PM	PH3 valve closed
1/7/2011	12:11:15 PM	SiCl4 pre valve closed
1/7/2011	12:11:15 PM	SiCl4 post valve closed
1/7/2011	12:11:15 PM	Main Vac valve closed
1/7/2011	12:11:15 PM	Bypass valve closed
1/7/2011	12:11:15 PM	Bubbler valve closed
1/7/2011	12:11:15 PM	Helium valve opened
1/7/2011	12:11:15 PM	Helium MFC set to  500.000000
1/7/2011	12:11:15 PM	H2 MFC set to  0.000000
1/7/2011	12:11:15 PM	BCl3 MFC set to  0.000000
1/7/2011	12:11:15 PM	PHl3 MFC set to  0.000000
1/7/2011	12:11:15 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:11:15 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:11:16 PM	Tube furnace set to 0
1/7/2011	12:11:20 PM	Helium valve closed
1/7/2011	12:11:20 PM	H2 valve closed
1/7/2011	12:11:20 PM	BCl3 valve closed
1/7/2011	12:11:20 PM	PH3 valve closed
1/7/2011	12:11:20 PM	SiCl4 pre valve closed
1/7/2011	12:11:20 PM	SiCl4 post valve closed
1/7/2011	12:11:20 PM	Main Vac valve closed
1/7/2011	12:11:20 PM	Bypass valve closed
1/7/2011	12:11:20 PM	Bubbler valve closed
1/7/2011	12:11:20 PM	Helium MFC set to  0.000000
1/7/2011	12:11:20 PM	H2 MFC set to  0.000000
1/7/2011	12:11:20 PM	BCl3 MFC set to  0.000000
1/7/2011	12:11:20 PM	PHl3 MFC set to  0.000000
1/7/2011	12:11:20 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:11:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:11:20 PM	Tube furnace set to 0
1/7/2011	12:11:21 PM	Run finished at 12:11 PM
1/7/2011	12:11:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	12:17:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	12:17:10 PM	Recipe started at 12:17 PM
1/7/2011	12:17:10 PM	Helium valve closed
1/7/2011	12:17:10 PM	H2 valve closed
1/7/2011	12:17:10 PM	BCl3 valve closed
1/7/2011	12:17:10 PM	PH3 valve closed
1/7/2011	12:17:10 PM	SiCl4 pre valve closed
1/7/2011	12:17:10 PM	SiCl4 post valve closed
1/7/2011	12:17:10 PM	Main Vac valve closed
1/7/2011	12:17:10 PM	Bubbler valve closed
1/7/2011	12:17:10 PM	Bypass valve opened
1/7/2011	12:17:10 PM	Helium MFC set to  0.000000
1/7/2011	12:17:10 PM	H2 MFC set to  0.000000
1/7/2011	12:17:10 PM	BCl3 MFC set to  0.000000
1/7/2011	12:17:10 PM	PHl3 MFC set to  0.000000
1/7/2011	12:17:10 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:17:10 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:17:10 PM	Tube furnace set to 0
1/7/2011	12:18:11 PM	Helium valve closed
1/7/2011	12:18:11 PM	H2 valve closed
1/7/2011	12:18:11 PM	BCl3 valve closed
1/7/2011	12:18:11 PM	PH3 valve closed
1/7/2011	12:18:11 PM	SiCl4 pre valve closed
1/7/2011	12:18:11 PM	SiCl4 post valve closed
1/7/2011	12:18:11 PM	Bubbler valve closed
1/7/2011	12:18:11 PM	Main Vac valve opened
1/7/2011	12:18:11 PM	Bypass valve opened
1/7/2011	12:18:11 PM	Helium MFC set to  0.000000
1/7/2011	12:18:11 PM	H2 MFC set to  0.000000
1/7/2011	12:18:11 PM	BCl3 MFC set to  0.000000
1/7/2011	12:18:11 PM	PHl3 MFC set to  0.000000
1/7/2011	12:18:11 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:18:11 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:18:11 PM	Tube furnace set to 0
1/7/2011	12:18:11 PM	Run finished at 12:18 PM
1/7/2011	12:18:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	12:19:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	12:19:45 PM	Recipe started at 12:19 PM
1/7/2011	12:19:45 PM	Helium valve closed
1/7/2011	12:19:45 PM	H2 valve closed
1/7/2011	12:19:45 PM	BCl3 valve closed
1/7/2011	12:19:45 PM	PH3 valve closed
1/7/2011	12:19:45 PM	SiCl4 pre valve closed
1/7/2011	12:19:45 PM	SiCl4 post valve closed
1/7/2011	12:19:45 PM	Main Vac valve closed
1/7/2011	12:19:45 PM	Bubbler valve closed
1/7/2011	12:19:45 PM	Bypass valve opened
1/7/2011	12:19:45 PM	Helium MFC set to  0.000000
1/7/2011	12:19:45 PM	H2 MFC set to  0.000000
1/7/2011	12:19:45 PM	BCl3 MFC set to  0.000000
1/7/2011	12:19:45 PM	PHl3 MFC set to  0.000000
1/7/2011	12:19:45 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:19:45 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:19:45 PM	Tube furnace set to 0
1/7/2011	12:19:46 PM	Helium valve closed
1/7/2011	12:19:46 PM	H2 valve closed
1/7/2011	12:19:46 PM	BCl3 valve closed
1/7/2011	12:19:46 PM	PH3 valve closed
1/7/2011	12:19:46 PM	SiCl4 pre valve closed
1/7/2011	12:19:46 PM	SiCl4 post valve closed
1/7/2011	12:19:46 PM	Bubbler valve closed
1/7/2011	12:19:46 PM	Main Vac valve opened
1/7/2011	12:19:46 PM	Bypass valve opened
1/7/2011	12:19:46 PM	Helium MFC set to  0.000000
1/7/2011	12:19:46 PM	H2 MFC set to  0.000000
1/7/2011	12:19:46 PM	BCl3 MFC set to  0.000000
1/7/2011	12:19:46 PM	PHl3 MFC set to  0.000000
1/7/2011	12:19:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:19:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:19:46 PM	Tube furnace set to 0
1/7/2011	12:20:46 PM	H2 valve closed
1/7/2011	12:20:46 PM	BCl3 valve closed
1/7/2011	12:20:46 PM	PH3 valve closed
1/7/2011	12:20:46 PM	SiCl4 pre valve closed
1/7/2011	12:20:46 PM	SiCl4 post valve closed
1/7/2011	12:20:46 PM	Bubbler valve closed
1/7/2011	12:20:46 PM	Helium valve opened
1/7/2011	12:20:46 PM	Main Vac valve opened
1/7/2011	12:20:46 PM	Bypass valve opened
1/7/2011	12:20:46 PM	Helium MFC set to  100.000000
1/7/2011	12:20:46 PM	H2 MFC set to  0.000000
1/7/2011	12:20:46 PM	BCl3 MFC set to  0.000000
1/7/2011	12:20:46 PM	PHl3 MFC set to  0.000000
1/7/2011	12:20:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:20:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:20:46 PM	Tube furnace set to 0
1/7/2011	12:21:46 PM	Helium valve closed
1/7/2011	12:21:46 PM	H2 valve closed
1/7/2011	12:21:46 PM	BCl3 valve closed
1/7/2011	12:21:46 PM	PH3 valve closed
1/7/2011	12:21:46 PM	SiCl4 pre valve closed
1/7/2011	12:21:46 PM	SiCl4 post valve closed
1/7/2011	12:21:46 PM	Bubbler valve closed
1/7/2011	12:21:46 PM	Main Vac valve opened
1/7/2011	12:21:46 PM	Bypass valve opened
1/7/2011	12:21:46 PM	Helium MFC set to  0.000000
1/7/2011	12:21:46 PM	H2 MFC set to  0.000000
1/7/2011	12:21:46 PM	BCl3 MFC set to  0.000000
1/7/2011	12:21:46 PM	PHl3 MFC set to  0.000000
1/7/2011	12:21:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:21:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:21:46 PM	Tube furnace set to 0
1/7/2011	12:22:46 PM	H2 valve closed
1/7/2011	12:22:46 PM	BCl3 valve closed
1/7/2011	12:22:46 PM	PH3 valve closed
1/7/2011	12:22:46 PM	SiCl4 pre valve closed
1/7/2011	12:22:46 PM	SiCl4 post valve closed
1/7/2011	12:22:46 PM	Bubbler valve closed
1/7/2011	12:22:46 PM	Helium valve opened
1/7/2011	12:22:46 PM	Main Vac valve opened
1/7/2011	12:22:46 PM	Bypass valve opened
1/7/2011	12:22:46 PM	Helium MFC set to  100.000000
1/7/2011	12:22:46 PM	H2 MFC set to  0.000000
1/7/2011	12:22:46 PM	BCl3 MFC set to  0.000000
1/7/2011	12:22:46 PM	PHl3 MFC set to  0.000000
1/7/2011	12:22:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:22:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:22:46 PM	Tube furnace set to 0
1/7/2011	12:23:46 PM	Helium valve closed
1/7/2011	12:23:46 PM	H2 valve closed
1/7/2011	12:23:46 PM	BCl3 valve closed
1/7/2011	12:23:46 PM	PH3 valve closed
1/7/2011	12:23:46 PM	SiCl4 pre valve closed
1/7/2011	12:23:46 PM	SiCl4 post valve closed
1/7/2011	12:23:46 PM	Bubbler valve closed
1/7/2011	12:23:46 PM	Main Vac valve opened
1/7/2011	12:23:46 PM	Bypass valve opened
1/7/2011	12:23:46 PM	Helium MFC set to  0.000000
1/7/2011	12:23:46 PM	H2 MFC set to  0.000000
1/7/2011	12:23:46 PM	BCl3 MFC set to  0.000000
1/7/2011	12:23:47 PM	PHl3 MFC set to  0.000000
1/7/2011	12:23:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:23:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:23:47 PM	Tube furnace set to 0
1/7/2011	12:24:47 PM	H2 valve closed
1/7/2011	12:24:47 PM	BCl3 valve closed
1/7/2011	12:24:47 PM	PH3 valve closed
1/7/2011	12:24:47 PM	SiCl4 pre valve closed
1/7/2011	12:24:47 PM	SiCl4 post valve closed
1/7/2011	12:24:47 PM	Bubbler valve closed
1/7/2011	12:24:47 PM	Helium valve opened
1/7/2011	12:24:47 PM	Main Vac valve opened
1/7/2011	12:24:47 PM	Bypass valve opened
1/7/2011	12:24:47 PM	Helium MFC set to  100.000000
1/7/2011	12:24:47 PM	H2 MFC set to  0.000000
1/7/2011	12:24:47 PM	BCl3 MFC set to  0.000000
1/7/2011	12:24:47 PM	PHl3 MFC set to  0.000000
1/7/2011	12:24:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:24:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:24:47 PM	Tube furnace set to 0
1/7/2011	12:25:47 PM	Helium valve closed
1/7/2011	12:25:47 PM	H2 valve closed
1/7/2011	12:25:47 PM	BCl3 valve closed
1/7/2011	12:25:47 PM	PH3 valve closed
1/7/2011	12:25:47 PM	SiCl4 pre valve closed
1/7/2011	12:25:47 PM	SiCl4 post valve closed
1/7/2011	12:25:47 PM	Bubbler valve closed
1/7/2011	12:25:47 PM	Main Vac valve opened
1/7/2011	12:25:47 PM	Bypass valve opened
1/7/2011	12:25:47 PM	Helium MFC set to  0.000000
1/7/2011	12:25:47 PM	H2 MFC set to  0.000000
1/7/2011	12:25:47 PM	BCl3 MFC set to  0.000000
1/7/2011	12:25:47 PM	PHl3 MFC set to  0.000000
1/7/2011	12:25:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:25:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:25:47 PM	Tube furnace set to 0
1/7/2011	12:26:47 PM	H2 valve closed
1/7/2011	12:26:47 PM	BCl3 valve closed
1/7/2011	12:26:47 PM	PH3 valve closed
1/7/2011	12:26:47 PM	SiCl4 pre valve closed
1/7/2011	12:26:47 PM	SiCl4 post valve closed
1/7/2011	12:26:47 PM	Bubbler valve closed
1/7/2011	12:26:47 PM	Helium valve opened
1/7/2011	12:26:47 PM	Main Vac valve opened
1/7/2011	12:26:47 PM	Bypass valve opened
1/7/2011	12:26:47 PM	Helium MFC set to  100.000000
1/7/2011	12:26:47 PM	H2 MFC set to  0.000000
1/7/2011	12:26:47 PM	BCl3 MFC set to  0.000000
1/7/2011	12:26:47 PM	PHl3 MFC set to  0.000000
1/7/2011	12:26:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:26:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:26:47 PM	Tube furnace set to 0
1/7/2011	12:27:47 PM	Helium valve closed
1/7/2011	12:27:47 PM	H2 valve closed
1/7/2011	12:27:47 PM	BCl3 valve closed
1/7/2011	12:27:47 PM	PH3 valve closed
1/7/2011	12:27:47 PM	SiCl4 pre valve closed
1/7/2011	12:27:47 PM	SiCl4 post valve closed
1/7/2011	12:27:47 PM	Bubbler valve closed
1/7/2011	12:27:47 PM	Main Vac valve opened
1/7/2011	12:27:47 PM	Bypass valve opened
1/7/2011	12:27:47 PM	Helium MFC set to  0.000000
1/7/2011	12:27:47 PM	H2 MFC set to  0.000000
1/7/2011	12:27:47 PM	BCl3 MFC set to  0.000000
1/7/2011	12:27:47 PM	PHl3 MFC set to  0.000000
1/7/2011	12:27:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:27:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:27:47 PM	Tube furnace set to 0
1/7/2011	12:28:48 PM	H2 valve closed
1/7/2011	12:28:48 PM	BCl3 valve closed
1/7/2011	12:28:48 PM	PH3 valve closed
1/7/2011	12:28:48 PM	SiCl4 pre valve closed
1/7/2011	12:28:48 PM	SiCl4 post valve closed
1/7/2011	12:28:48 PM	Bubbler valve closed
1/7/2011	12:28:48 PM	Helium valve opened
1/7/2011	12:28:48 PM	Main Vac valve opened
1/7/2011	12:28:48 PM	Bypass valve opened
1/7/2011	12:28:48 PM	Helium MFC set to  100.000000
1/7/2011	12:28:48 PM	H2 MFC set to  0.000000
1/7/2011	12:28:48 PM	BCl3 MFC set to  0.000000
1/7/2011	12:28:48 PM	PHl3 MFC set to  0.000000
1/7/2011	12:28:48 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:28:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:28:48 PM	Tube furnace set to 0
1/7/2011	12:29:48 PM	Helium valve closed
1/7/2011	12:29:48 PM	H2 valve closed
1/7/2011	12:29:48 PM	BCl3 valve closed
1/7/2011	12:29:48 PM	PH3 valve closed
1/7/2011	12:29:48 PM	SiCl4 pre valve closed
1/7/2011	12:29:48 PM	SiCl4 post valve closed
1/7/2011	12:29:48 PM	Bubbler valve closed
1/7/2011	12:29:48 PM	Main Vac valve opened
1/7/2011	12:29:48 PM	Bypass valve opened
1/7/2011	12:29:48 PM	Helium MFC set to  0.000000
1/7/2011	12:29:48 PM	H2 MFC set to  0.000000
1/7/2011	12:29:48 PM	BCl3 MFC set to  0.000000
1/7/2011	12:29:48 PM	PHl3 MFC set to  0.000000
1/7/2011	12:29:48 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:29:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:29:48 PM	Tube furnace set to 0
1/7/2011	12:30:48 PM	H2 valve closed
1/7/2011	12:30:48 PM	BCl3 valve closed
1/7/2011	12:30:48 PM	PH3 valve closed
1/7/2011	12:30:48 PM	SiCl4 pre valve closed
1/7/2011	12:30:48 PM	SiCl4 post valve closed
1/7/2011	12:30:48 PM	Bubbler valve closed
1/7/2011	12:30:48 PM	Helium valve opened
1/7/2011	12:30:48 PM	Main Vac valve opened
1/7/2011	12:30:48 PM	Bypass valve opened
1/7/2011	12:30:48 PM	Helium MFC set to  100.000000
1/7/2011	12:30:48 PM	H2 MFC set to  0.000000
1/7/2011	12:30:48 PM	BCl3 MFC set to  0.000000
1/7/2011	12:30:48 PM	PHl3 MFC set to  0.000000
1/7/2011	12:30:48 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:30:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:30:48 PM	Tube furnace set to 0
1/7/2011	12:31:48 PM	Helium valve closed
1/7/2011	12:31:48 PM	H2 valve closed
1/7/2011	12:31:48 PM	BCl3 valve closed
1/7/2011	12:31:48 PM	PH3 valve closed
1/7/2011	12:31:48 PM	SiCl4 pre valve closed
1/7/2011	12:31:48 PM	SiCl4 post valve closed
1/7/2011	12:31:48 PM	Bubbler valve closed
1/7/2011	12:31:48 PM	Main Vac valve opened
1/7/2011	12:31:48 PM	Bypass valve opened
1/7/2011	12:31:48 PM	Helium MFC set to  0.000000
1/7/2011	12:31:48 PM	H2 MFC set to  0.000000
1/7/2011	12:31:48 PM	BCl3 MFC set to  0.000000
1/7/2011	12:31:48 PM	PHl3 MFC set to  0.000000
1/7/2011	12:31:48 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:31:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:31:48 PM	Tube furnace set to 0
1/7/2011	12:32:48 PM	H2 valve closed
1/7/2011	12:32:48 PM	BCl3 valve closed
1/7/2011	12:32:48 PM	PH3 valve closed
1/7/2011	12:32:48 PM	SiCl4 pre valve closed
1/7/2011	12:32:48 PM	SiCl4 post valve closed
1/7/2011	12:32:48 PM	Bubbler valve closed
1/7/2011	12:32:48 PM	Helium valve opened
1/7/2011	12:32:48 PM	Main Vac valve opened
1/7/2011	12:32:48 PM	Bypass valve opened
1/7/2011	12:32:48 PM	Helium MFC set to  100.000000
1/7/2011	12:32:48 PM	H2 MFC set to  0.000000
1/7/2011	12:32:48 PM	BCl3 MFC set to  0.000000
1/7/2011	12:32:48 PM	PHl3 MFC set to  0.000000
1/7/2011	12:32:48 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:32:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:32:49 PM	Tube furnace set to 0
1/7/2011	12:33:49 PM	Helium valve closed
1/7/2011	12:33:49 PM	H2 valve closed
1/7/2011	12:33:49 PM	BCl3 valve closed
1/7/2011	12:33:49 PM	PH3 valve closed
1/7/2011	12:33:49 PM	SiCl4 pre valve closed
1/7/2011	12:33:49 PM	SiCl4 post valve closed
1/7/2011	12:33:49 PM	Bubbler valve closed
1/7/2011	12:33:49 PM	Main Vac valve opened
1/7/2011	12:33:49 PM	Bypass valve opened
1/7/2011	12:33:49 PM	Helium MFC set to  0.000000
1/7/2011	12:33:49 PM	H2 MFC set to  0.000000
1/7/2011	12:33:49 PM	BCl3 MFC set to  0.000000
1/7/2011	12:33:49 PM	PHl3 MFC set to  0.000000
1/7/2011	12:33:49 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:33:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:33:49 PM	Tube furnace set to 0
1/7/2011	12:34:49 PM	H2 valve closed
1/7/2011	12:34:49 PM	BCl3 valve closed
1/7/2011	12:34:49 PM	PH3 valve closed
1/7/2011	12:34:49 PM	SiCl4 pre valve closed
1/7/2011	12:34:49 PM	SiCl4 post valve closed
1/7/2011	12:34:49 PM	Bubbler valve closed
1/7/2011	12:34:49 PM	Helium valve opened
1/7/2011	12:34:49 PM	Main Vac valve opened
1/7/2011	12:34:49 PM	Bypass valve opened
1/7/2011	12:34:49 PM	Helium MFC set to  100.000000
1/7/2011	12:34:49 PM	H2 MFC set to  0.000000
1/7/2011	12:34:49 PM	BCl3 MFC set to  0.000000
1/7/2011	12:34:49 PM	PHl3 MFC set to  0.000000
1/7/2011	12:34:49 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:34:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:34:49 PM	Tube furnace set to 0
1/7/2011	12:35:49 PM	Helium valve closed
1/7/2011	12:35:49 PM	H2 valve closed
1/7/2011	12:35:49 PM	BCl3 valve closed
1/7/2011	12:35:49 PM	PH3 valve closed
1/7/2011	12:35:49 PM	SiCl4 pre valve closed
1/7/2011	12:35:49 PM	SiCl4 post valve closed
1/7/2011	12:35:49 PM	Bubbler valve closed
1/7/2011	12:35:49 PM	Main Vac valve opened
1/7/2011	12:35:49 PM	Bypass valve opened
1/7/2011	12:35:49 PM	Helium MFC set to  0.000000
1/7/2011	12:35:49 PM	H2 MFC set to  0.000000
1/7/2011	12:35:49 PM	BCl3 MFC set to  0.000000
1/7/2011	12:35:49 PM	PHl3 MFC set to  0.000000
1/7/2011	12:35:49 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:35:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:35:49 PM	Tube furnace set to 0
1/7/2011	12:36:49 PM	H2 valve closed
1/7/2011	12:36:49 PM	BCl3 valve closed
1/7/2011	12:36:49 PM	PH3 valve closed
1/7/2011	12:36:49 PM	SiCl4 pre valve closed
1/7/2011	12:36:49 PM	SiCl4 post valve closed
1/7/2011	12:36:49 PM	Bubbler valve closed
1/7/2011	12:36:49 PM	Helium valve opened
1/7/2011	12:36:49 PM	Main Vac valve opened
1/7/2011	12:36:49 PM	Bypass valve opened
1/7/2011	12:36:49 PM	Helium MFC set to  100.000000
1/7/2011	12:36:49 PM	H2 MFC set to  0.000000
1/7/2011	12:36:49 PM	BCl3 MFC set to  0.000000
1/7/2011	12:36:49 PM	PHl3 MFC set to  0.000000
1/7/2011	12:36:49 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:36:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:36:49 PM	Tube furnace set to 0
1/7/2011	12:37:49 PM	Helium valve closed
1/7/2011	12:37:49 PM	H2 valve closed
1/7/2011	12:37:49 PM	BCl3 valve closed
1/7/2011	12:37:49 PM	PH3 valve closed
1/7/2011	12:37:49 PM	SiCl4 pre valve closed
1/7/2011	12:37:49 PM	SiCl4 post valve closed
1/7/2011	12:37:49 PM	Bubbler valve closed
1/7/2011	12:37:49 PM	Main Vac valve opened
1/7/2011	12:37:49 PM	Bypass valve opened
1/7/2011	12:37:49 PM	Helium MFC set to  0.000000
1/7/2011	12:37:49 PM	H2 MFC set to  0.000000
1/7/2011	12:37:49 PM	BCl3 MFC set to  0.000000
1/7/2011	12:37:49 PM	PHl3 MFC set to  0.000000
1/7/2011	12:37:49 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:37:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:37:50 PM	Tube furnace set to 0
1/7/2011	12:38:50 PM	H2 valve closed
1/7/2011	12:38:50 PM	BCl3 valve closed
1/7/2011	12:38:50 PM	PH3 valve closed
1/7/2011	12:38:50 PM	SiCl4 pre valve closed
1/7/2011	12:38:50 PM	SiCl4 post valve closed
1/7/2011	12:38:50 PM	Bubbler valve closed
1/7/2011	12:38:50 PM	Helium valve opened
1/7/2011	12:38:50 PM	Main Vac valve opened
1/7/2011	12:38:50 PM	Bypass valve opened
1/7/2011	12:38:50 PM	Helium MFC set to  100.000000
1/7/2011	12:38:50 PM	H2 MFC set to  0.000000
1/7/2011	12:38:50 PM	BCl3 MFC set to  0.000000
1/7/2011	12:38:50 PM	PHl3 MFC set to  0.000000
1/7/2011	12:38:50 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:38:50 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:38:50 PM	Tube furnace set to 0
1/7/2011	12:39:50 PM	Helium valve closed
1/7/2011	12:39:50 PM	H2 valve closed
1/7/2011	12:39:50 PM	BCl3 valve closed
1/7/2011	12:39:50 PM	PH3 valve closed
1/7/2011	12:39:50 PM	SiCl4 pre valve closed
1/7/2011	12:39:50 PM	SiCl4 post valve closed
1/7/2011	12:39:50 PM	Bubbler valve closed
1/7/2011	12:39:50 PM	Main Vac valve opened
1/7/2011	12:39:50 PM	Bypass valve opened
1/7/2011	12:39:50 PM	Helium MFC set to  0.000000
1/7/2011	12:39:50 PM	H2 MFC set to  0.000000
1/7/2011	12:39:50 PM	BCl3 MFC set to  0.000000
1/7/2011	12:39:50 PM	PHl3 MFC set to  0.000000
1/7/2011	12:39:50 PM	SiCl4 MFC set to  0.000000
1/7/2011	12:39:50 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	12:39:50 PM	Tube furnace set to 0
1/7/2011	12:39:51 PM	Run finished at 12:39 PM
1/7/2011	12:39:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	1:44:27 PM	Recipe started at 1:44 PM
1/7/2011	1:44:27 PM	Helium valve closed
1/7/2011	1:44:27 PM	BCl3 valve closed
1/7/2011	1:44:27 PM	PH3 valve closed
1/7/2011	1:44:27 PM	SiCl4 pre valve closed
1/7/2011	1:44:27 PM	SiCl4 post valve closed
1/7/2011	1:44:27 PM	Main Vac valve closed
1/7/2011	1:44:27 PM	Bypass valve closed
1/7/2011	1:44:27 PM	Bubbler valve closed
1/7/2011	1:44:27 PM	H2 valve opened
1/7/2011	1:44:27 PM	Helium MFC set to  0.000000
1/7/2011	1:44:27 PM	H2 MFC set to  500.000000
1/7/2011	1:44:27 PM	BCl3 MFC set to  0.000000
1/7/2011	1:44:27 PM	PHl3 MFC set to  0.000000
1/7/2011	1:44:27 PM	SiCl4 MFC set to  0.000000
1/7/2011	1:44:27 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	1:44:27 PM	Tube furnace set to 0
1/7/2011	1:45:47 PM	Helium valve closed
1/7/2011	1:45:47 PM	BCl3 valve closed
1/7/2011	1:45:47 PM	PH3 valve closed
1/7/2011	1:45:47 PM	SiCl4 pre valve closed
1/7/2011	1:45:47 PM	SiCl4 post valve closed
1/7/2011	1:45:47 PM	Main Vac valve closed
1/7/2011	1:45:47 PM	Bypass valve closed
1/7/2011	1:45:47 PM	H2 valve opened
1/7/2011	1:45:47 PM	Bubbler valve opened
1/7/2011	1:45:47 PM	Helium MFC set to  0.000000
1/7/2011	1:45:47 PM	H2 MFC set to  500.000000
1/7/2011	1:45:47 PM	BCl3 MFC set to  0.000000
1/7/2011	1:45:47 PM	PHl3 MFC set to  0.000000
1/7/2011	1:45:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	1:45:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	1:45:47 PM	Tube furnace set to 1000
1/7/2011	2:05:47 PM	Helium valve closed
1/7/2011	2:05:47 PM	PH3 valve closed
1/7/2011	2:05:47 PM	Main Vac valve closed
1/7/2011	2:05:47 PM	Bypass valve closed
1/7/2011	2:05:47 PM	H2 valve opened
1/7/2011	2:05:47 PM	BCl3 valve opened
1/7/2011	2:05:47 PM	SiCl4 pre valve opened
1/7/2011	2:05:47 PM	SiCl4 post valve opened
1/7/2011	2:05:47 PM	Bubbler valve opened
1/7/2011	2:05:47 PM	Helium MFC set to  0.000000
1/7/2011	2:05:47 PM	H2 MFC set to  500.000000
1/7/2011	2:05:47 PM	BCl3 MFC set to  1.800000
1/7/2011	2:05:47 PM	PHl3 MFC set to  0.000000
1/7/2011	2:05:47 PM	SiCl4 MFC set to  50.000000
1/7/2011	2:05:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	2:05:47 PM	Tube furnace set to 1000
1/7/2011	2:20:47 PM	H2 valve closed
1/7/2011	2:20:47 PM	BCl3 valve closed
1/7/2011	2:20:47 PM	PH3 valve closed
1/7/2011	2:20:47 PM	SiCl4 pre valve closed
1/7/2011	2:20:47 PM	SiCl4 post valve closed
1/7/2011	2:20:47 PM	Main Vac valve closed
1/7/2011	2:20:47 PM	Bypass valve closed
1/7/2011	2:20:47 PM	Helium valve opened
1/7/2011	2:20:47 PM	Bubbler valve opened
1/7/2011	2:20:47 PM	Helium MFC set to  500.000000
1/7/2011	2:20:47 PM	H2 MFC set to  0.000000
1/7/2011	2:20:47 PM	BCl3 MFC set to  0.000000
1/7/2011	2:20:47 PM	PHl3 MFC set to  0.000000
1/7/2011	2:20:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	2:20:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	2:20:48 PM	Tube furnace set to 0
1/7/2011	2:40:48 PM	Helium valve closed
1/7/2011	2:40:48 PM	H2 valve closed
1/7/2011	2:40:48 PM	BCl3 valve closed
1/7/2011	2:40:48 PM	PH3 valve closed
1/7/2011	2:40:48 PM	SiCl4 pre valve closed
1/7/2011	2:40:48 PM	SiCl4 post valve closed
1/7/2011	2:40:48 PM	Main Vac valve closed
1/7/2011	2:40:48 PM	Bypass valve closed
1/7/2011	2:40:48 PM	Bubbler valve closed
1/7/2011	2:40:48 PM	Helium MFC set to  0.000000
1/7/2011	2:40:48 PM	H2 MFC set to  0.000000
1/7/2011	2:40:48 PM	BCl3 MFC set to  0.000000
1/7/2011	2:40:48 PM	PHl3 MFC set to  0.000000
1/7/2011	2:40:48 PM	SiCl4 MFC set to  0.000000
1/7/2011	2:40:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	2:40:48 PM	Tube furnace set to 0
1/7/2011	2:40:48 PM	Run finished at 2:40 PM
1/7/2011	3:28:13 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	3:28:14 PM	Recipe started at 3:28 PM
1/7/2011	3:28:14 PM	H2 valve closed
1/7/2011	3:28:14 PM	BCl3 valve closed
1/7/2011	3:28:14 PM	PH3 valve closed
1/7/2011	3:28:14 PM	SiCl4 pre valve closed
1/7/2011	3:28:14 PM	SiCl4 post valve closed
1/7/2011	3:28:14 PM	Main Vac valve closed
1/7/2011	3:28:14 PM	Bypass valve closed
1/7/2011	3:28:14 PM	Bubbler valve closed
1/7/2011	3:28:14 PM	Helium valve opened
1/7/2011	3:28:14 PM	Helium MFC set to  500.000000
1/7/2011	3:28:14 PM	H2 MFC set to  0.000000
1/7/2011	3:28:14 PM	BCl3 MFC set to  0.000000
1/7/2011	3:28:14 PM	PHl3 MFC set to  0.000000
1/7/2011	3:28:14 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:28:14 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:28:14 PM	Tube furnace set to 0
1/7/2011	3:28:18 PM	Helium valve closed
1/7/2011	3:28:18 PM	H2 valve closed
1/7/2011	3:28:18 PM	BCl3 valve closed
1/7/2011	3:28:18 PM	PH3 valve closed
1/7/2011	3:28:18 PM	SiCl4 pre valve closed
1/7/2011	3:28:18 PM	SiCl4 post valve closed
1/7/2011	3:28:18 PM	Main Vac valve closed
1/7/2011	3:28:18 PM	Bypass valve closed
1/7/2011	3:28:18 PM	Bubbler valve closed
1/7/2011	3:28:18 PM	Helium MFC set to  0.000000
1/7/2011	3:28:18 PM	H2 MFC set to  0.000000
1/7/2011	3:28:18 PM	BCl3 MFC set to  0.000000
1/7/2011	3:28:18 PM	PHl3 MFC set to  0.000000
1/7/2011	3:28:18 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:28:18 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:28:18 PM	Tube furnace set to 0
1/7/2011	3:28:19 PM	Run finished at 3:28 PM
1/7/2011	3:28:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	3:33:55 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	3:33:55 PM	Recipe started at 3:33 PM
1/7/2011	3:33:55 PM	Helium valve closed
1/7/2011	3:33:55 PM	H2 valve closed
1/7/2011	3:33:55 PM	BCl3 valve closed
1/7/2011	3:33:55 PM	PH3 valve closed
1/7/2011	3:33:55 PM	SiCl4 pre valve closed
1/7/2011	3:33:55 PM	SiCl4 post valve closed
1/7/2011	3:33:55 PM	Main Vac valve closed
1/7/2011	3:33:55 PM	Bubbler valve closed
1/7/2011	3:33:55 PM	Bypass valve opened
1/7/2011	3:33:55 PM	Helium MFC set to  0.000000
1/7/2011	3:33:55 PM	H2 MFC set to  0.000000
1/7/2011	3:33:55 PM	BCl3 MFC set to  0.000000
1/7/2011	3:33:55 PM	PHl3 MFC set to  0.000000
1/7/2011	3:33:55 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:33:55 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:33:55 PM	Tube furnace set to 0
1/7/2011	3:34:56 PM	Helium valve closed
1/7/2011	3:34:56 PM	H2 valve closed
1/7/2011	3:34:56 PM	BCl3 valve closed
1/7/2011	3:34:56 PM	PH3 valve closed
1/7/2011	3:34:56 PM	SiCl4 pre valve closed
1/7/2011	3:34:56 PM	SiCl4 post valve closed
1/7/2011	3:34:56 PM	Bubbler valve closed
1/7/2011	3:34:56 PM	Main Vac valve opened
1/7/2011	3:34:56 PM	Bypass valve opened
1/7/2011	3:34:56 PM	Helium MFC set to  0.000000
1/7/2011	3:34:56 PM	H2 MFC set to  0.000000
1/7/2011	3:34:56 PM	BCl3 MFC set to  0.000000
1/7/2011	3:34:56 PM	PHl3 MFC set to  0.000000
1/7/2011	3:34:56 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:34:56 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:34:56 PM	Tube furnace set to 0
1/7/2011	3:34:56 PM	Run finished at 3:34 PM
1/7/2011	3:34:56 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	3:37:30 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	3:37:43 PM	Recipe started at 3:37 PM
1/7/2011	3:37:43 PM	Helium valve closed
1/7/2011	3:37:43 PM	H2 valve closed
1/7/2011	3:37:43 PM	BCl3 valve closed
1/7/2011	3:37:43 PM	PH3 valve closed
1/7/2011	3:37:43 PM	SiCl4 pre valve closed
1/7/2011	3:37:43 PM	SiCl4 post valve closed
1/7/2011	3:37:43 PM	Main Vac valve closed
1/7/2011	3:37:43 PM	Bubbler valve closed
1/7/2011	3:37:43 PM	Bypass valve opened
1/7/2011	3:37:43 PM	Helium MFC set to  0.000000
1/7/2011	3:37:43 PM	H2 MFC set to  0.000000
1/7/2011	3:37:43 PM	BCl3 MFC set to  0.000000
1/7/2011	3:37:43 PM	PHl3 MFC set to  0.000000
1/7/2011	3:37:43 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:37:43 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:37:43 PM	Tube furnace set to 0
1/7/2011	3:37:43 PM	Helium valve closed
1/7/2011	3:37:43 PM	H2 valve closed
1/7/2011	3:37:43 PM	BCl3 valve closed
1/7/2011	3:37:43 PM	PH3 valve closed
1/7/2011	3:37:43 PM	SiCl4 pre valve closed
1/7/2011	3:37:43 PM	SiCl4 post valve closed
1/7/2011	3:37:43 PM	Bubbler valve closed
1/7/2011	3:37:43 PM	Main Vac valve opened
1/7/2011	3:37:43 PM	Bypass valve opened
1/7/2011	3:37:43 PM	Helium MFC set to  0.000000
1/7/2011	3:37:43 PM	H2 MFC set to  0.000000
1/7/2011	3:37:43 PM	BCl3 MFC set to  0.000000
1/7/2011	3:37:43 PM	PHl3 MFC set to  0.000000
1/7/2011	3:37:43 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:37:44 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:37:44 PM	Tube furnace set to 0
1/7/2011	3:38:44 PM	H2 valve closed
1/7/2011	3:38:44 PM	BCl3 valve closed
1/7/2011	3:38:44 PM	PH3 valve closed
1/7/2011	3:38:44 PM	SiCl4 pre valve closed
1/7/2011	3:38:44 PM	SiCl4 post valve closed
1/7/2011	3:38:44 PM	Bubbler valve closed
1/7/2011	3:38:44 PM	Helium valve opened
1/7/2011	3:38:44 PM	Main Vac valve opened
1/7/2011	3:38:44 PM	Bypass valve opened
1/7/2011	3:38:44 PM	Helium MFC set to  100.000000
1/7/2011	3:38:44 PM	H2 MFC set to  0.000000
1/7/2011	3:38:44 PM	BCl3 MFC set to  0.000000
1/7/2011	3:38:44 PM	PHl3 MFC set to  0.000000
1/7/2011	3:38:44 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:38:44 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:38:44 PM	Tube furnace set to 0
1/7/2011	3:39:44 PM	Helium valve closed
1/7/2011	3:39:44 PM	H2 valve closed
1/7/2011	3:39:44 PM	BCl3 valve closed
1/7/2011	3:39:44 PM	PH3 valve closed
1/7/2011	3:39:44 PM	SiCl4 pre valve closed
1/7/2011	3:39:44 PM	SiCl4 post valve closed
1/7/2011	3:39:44 PM	Bubbler valve closed
1/7/2011	3:39:44 PM	Main Vac valve opened
1/7/2011	3:39:44 PM	Bypass valve opened
1/7/2011	3:39:44 PM	Helium MFC set to  0.000000
1/7/2011	3:39:44 PM	H2 MFC set to  0.000000
1/7/2011	3:39:44 PM	BCl3 MFC set to  0.000000
1/7/2011	3:39:44 PM	PHl3 MFC set to  0.000000
1/7/2011	3:39:44 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:39:44 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:39:44 PM	Tube furnace set to 0
1/7/2011	3:40:44 PM	H2 valve closed
1/7/2011	3:40:44 PM	BCl3 valve closed
1/7/2011	3:40:44 PM	PH3 valve closed
1/7/2011	3:40:44 PM	SiCl4 pre valve closed
1/7/2011	3:40:44 PM	SiCl4 post valve closed
1/7/2011	3:40:44 PM	Bubbler valve closed
1/7/2011	3:40:44 PM	Helium valve opened
1/7/2011	3:40:44 PM	Main Vac valve opened
1/7/2011	3:40:44 PM	Bypass valve opened
1/7/2011	3:40:44 PM	Helium MFC set to  100.000000
1/7/2011	3:40:44 PM	H2 MFC set to  0.000000
1/7/2011	3:40:44 PM	BCl3 MFC set to  0.000000
1/7/2011	3:40:44 PM	PHl3 MFC set to  0.000000
1/7/2011	3:40:44 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:40:44 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:40:44 PM	Tube furnace set to 0
1/7/2011	3:41:44 PM	Helium valve closed
1/7/2011	3:41:44 PM	H2 valve closed
1/7/2011	3:41:44 PM	BCl3 valve closed
1/7/2011	3:41:44 PM	PH3 valve closed
1/7/2011	3:41:44 PM	SiCl4 pre valve closed
1/7/2011	3:41:44 PM	SiCl4 post valve closed
1/7/2011	3:41:44 PM	Bubbler valve closed
1/7/2011	3:41:44 PM	Main Vac valve opened
1/7/2011	3:41:44 PM	Bypass valve opened
1/7/2011	3:41:44 PM	Helium MFC set to  0.000000
1/7/2011	3:41:44 PM	H2 MFC set to  0.000000
1/7/2011	3:41:44 PM	BCl3 MFC set to  0.000000
1/7/2011	3:41:44 PM	PHl3 MFC set to  0.000000
1/7/2011	3:41:44 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:41:44 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:41:44 PM	Tube furnace set to 0
1/7/2011	3:42:45 PM	H2 valve closed
1/7/2011	3:42:45 PM	BCl3 valve closed
1/7/2011	3:42:45 PM	PH3 valve closed
1/7/2011	3:42:45 PM	SiCl4 pre valve closed
1/7/2011	3:42:45 PM	SiCl4 post valve closed
1/7/2011	3:42:45 PM	Bubbler valve closed
1/7/2011	3:42:45 PM	Helium valve opened
1/7/2011	3:42:45 PM	Main Vac valve opened
1/7/2011	3:42:45 PM	Bypass valve opened
1/7/2011	3:42:45 PM	Helium MFC set to  100.000000
1/7/2011	3:42:45 PM	H2 MFC set to  0.000000
1/7/2011	3:42:45 PM	BCl3 MFC set to  0.000000
1/7/2011	3:42:45 PM	PHl3 MFC set to  0.000000
1/7/2011	3:42:45 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:42:45 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:42:45 PM	Tube furnace set to 0
1/7/2011	3:43:45 PM	Helium valve closed
1/7/2011	3:43:45 PM	H2 valve closed
1/7/2011	3:43:45 PM	BCl3 valve closed
1/7/2011	3:43:45 PM	PH3 valve closed
1/7/2011	3:43:45 PM	SiCl4 pre valve closed
1/7/2011	3:43:45 PM	SiCl4 post valve closed
1/7/2011	3:43:45 PM	Bubbler valve closed
1/7/2011	3:43:45 PM	Main Vac valve opened
1/7/2011	3:43:45 PM	Bypass valve opened
1/7/2011	3:43:45 PM	Helium MFC set to  0.000000
1/7/2011	3:43:45 PM	H2 MFC set to  0.000000
1/7/2011	3:43:45 PM	BCl3 MFC set to  0.000000
1/7/2011	3:43:45 PM	PHl3 MFC set to  0.000000
1/7/2011	3:43:45 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:43:45 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:43:45 PM	Tube furnace set to 0
1/7/2011	3:44:45 PM	H2 valve closed
1/7/2011	3:44:45 PM	BCl3 valve closed
1/7/2011	3:44:45 PM	PH3 valve closed
1/7/2011	3:44:45 PM	SiCl4 pre valve closed
1/7/2011	3:44:45 PM	SiCl4 post valve closed
1/7/2011	3:44:45 PM	Bubbler valve closed
1/7/2011	3:44:45 PM	Helium valve opened
1/7/2011	3:44:45 PM	Main Vac valve opened
1/7/2011	3:44:45 PM	Bypass valve opened
1/7/2011	3:44:45 PM	Helium MFC set to  100.000000
1/7/2011	3:44:45 PM	H2 MFC set to  0.000000
1/7/2011	3:44:45 PM	BCl3 MFC set to  0.000000
1/7/2011	3:44:45 PM	PHl3 MFC set to  0.000000
1/7/2011	3:44:45 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:44:45 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:44:45 PM	Tube furnace set to 0
1/7/2011	3:45:45 PM	Helium valve closed
1/7/2011	3:45:45 PM	H2 valve closed
1/7/2011	3:45:45 PM	BCl3 valve closed
1/7/2011	3:45:45 PM	PH3 valve closed
1/7/2011	3:45:45 PM	SiCl4 pre valve closed
1/7/2011	3:45:45 PM	SiCl4 post valve closed
1/7/2011	3:45:45 PM	Bubbler valve closed
1/7/2011	3:45:45 PM	Main Vac valve opened
1/7/2011	3:45:45 PM	Bypass valve opened
1/7/2011	3:45:45 PM	Helium MFC set to  0.000000
1/7/2011	3:45:45 PM	H2 MFC set to  0.000000
1/7/2011	3:45:45 PM	BCl3 MFC set to  0.000000
1/7/2011	3:45:45 PM	PHl3 MFC set to  0.000000
1/7/2011	3:45:45 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:45:45 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:45:45 PM	Tube furnace set to 0
1/7/2011	3:46:45 PM	H2 valve closed
1/7/2011	3:46:45 PM	BCl3 valve closed
1/7/2011	3:46:45 PM	PH3 valve closed
1/7/2011	3:46:45 PM	SiCl4 pre valve closed
1/7/2011	3:46:45 PM	SiCl4 post valve closed
1/7/2011	3:46:45 PM	Bubbler valve closed
1/7/2011	3:46:45 PM	Helium valve opened
1/7/2011	3:46:45 PM	Main Vac valve opened
1/7/2011	3:46:45 PM	Bypass valve opened
1/7/2011	3:46:45 PM	Helium MFC set to  100.000000
1/7/2011	3:46:45 PM	H2 MFC set to  0.000000
1/7/2011	3:46:45 PM	BCl3 MFC set to  0.000000
1/7/2011	3:46:45 PM	PHl3 MFC set to  0.000000
1/7/2011	3:46:45 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:46:45 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:46:45 PM	Tube furnace set to 0
1/7/2011	3:47:46 PM	Helium valve closed
1/7/2011	3:47:46 PM	H2 valve closed
1/7/2011	3:47:46 PM	BCl3 valve closed
1/7/2011	3:47:46 PM	PH3 valve closed
1/7/2011	3:47:46 PM	SiCl4 pre valve closed
1/7/2011	3:47:46 PM	SiCl4 post valve closed
1/7/2011	3:47:46 PM	Bubbler valve closed
1/7/2011	3:47:46 PM	Main Vac valve opened
1/7/2011	3:47:46 PM	Bypass valve opened
1/7/2011	3:47:46 PM	Helium MFC set to  0.000000
1/7/2011	3:47:46 PM	H2 MFC set to  0.000000
1/7/2011	3:47:46 PM	BCl3 MFC set to  0.000000
1/7/2011	3:47:46 PM	PHl3 MFC set to  0.000000
1/7/2011	3:47:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:47:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:47:46 PM	Tube furnace set to 0
1/7/2011	3:48:46 PM	H2 valve closed
1/7/2011	3:48:46 PM	BCl3 valve closed
1/7/2011	3:48:46 PM	PH3 valve closed
1/7/2011	3:48:46 PM	SiCl4 pre valve closed
1/7/2011	3:48:46 PM	SiCl4 post valve closed
1/7/2011	3:48:46 PM	Bubbler valve closed
1/7/2011	3:48:46 PM	Helium valve opened
1/7/2011	3:48:46 PM	Main Vac valve opened
1/7/2011	3:48:46 PM	Bypass valve opened
1/7/2011	3:48:46 PM	Helium MFC set to  100.000000
1/7/2011	3:48:46 PM	H2 MFC set to  0.000000
1/7/2011	3:48:46 PM	BCl3 MFC set to  0.000000
1/7/2011	3:48:46 PM	PHl3 MFC set to  0.000000
1/7/2011	3:48:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:48:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:48:46 PM	Tube furnace set to 0
1/7/2011	3:49:46 PM	Helium valve closed
1/7/2011	3:49:46 PM	H2 valve closed
1/7/2011	3:49:46 PM	BCl3 valve closed
1/7/2011	3:49:46 PM	PH3 valve closed
1/7/2011	3:49:46 PM	SiCl4 pre valve closed
1/7/2011	3:49:46 PM	SiCl4 post valve closed
1/7/2011	3:49:46 PM	Bubbler valve closed
1/7/2011	3:49:46 PM	Main Vac valve opened
1/7/2011	3:49:46 PM	Bypass valve opened
1/7/2011	3:49:46 PM	Helium MFC set to  0.000000
1/7/2011	3:49:46 PM	H2 MFC set to  0.000000
1/7/2011	3:49:46 PM	BCl3 MFC set to  0.000000
1/7/2011	3:49:46 PM	PHl3 MFC set to  0.000000
1/7/2011	3:49:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:49:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:49:46 PM	Tube furnace set to 0
1/7/2011	3:50:46 PM	H2 valve closed
1/7/2011	3:50:46 PM	BCl3 valve closed
1/7/2011	3:50:46 PM	PH3 valve closed
1/7/2011	3:50:46 PM	SiCl4 pre valve closed
1/7/2011	3:50:46 PM	SiCl4 post valve closed
1/7/2011	3:50:46 PM	Bubbler valve closed
1/7/2011	3:50:46 PM	Helium valve opened
1/7/2011	3:50:46 PM	Main Vac valve opened
1/7/2011	3:50:46 PM	Bypass valve opened
1/7/2011	3:50:46 PM	Helium MFC set to  100.000000
1/7/2011	3:50:46 PM	H2 MFC set to  0.000000
1/7/2011	3:50:46 PM	BCl3 MFC set to  0.000000
1/7/2011	3:50:46 PM	PHl3 MFC set to  0.000000
1/7/2011	3:50:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:50:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:50:46 PM	Tube furnace set to 0
1/7/2011	3:51:46 PM	Helium valve closed
1/7/2011	3:51:46 PM	H2 valve closed
1/7/2011	3:51:46 PM	BCl3 valve closed
1/7/2011	3:51:46 PM	PH3 valve closed
1/7/2011	3:51:46 PM	SiCl4 pre valve closed
1/7/2011	3:51:46 PM	SiCl4 post valve closed
1/7/2011	3:51:46 PM	Bubbler valve closed
1/7/2011	3:51:46 PM	Main Vac valve opened
1/7/2011	3:51:46 PM	Bypass valve opened
1/7/2011	3:51:46 PM	Helium MFC set to  0.000000
1/7/2011	3:51:46 PM	H2 MFC set to  0.000000
1/7/2011	3:51:46 PM	BCl3 MFC set to  0.000000
1/7/2011	3:51:46 PM	PHl3 MFC set to  0.000000
1/7/2011	3:51:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:51:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:51:47 PM	Tube furnace set to 0
1/7/2011	3:52:47 PM	H2 valve closed
1/7/2011	3:52:47 PM	BCl3 valve closed
1/7/2011	3:52:47 PM	PH3 valve closed
1/7/2011	3:52:47 PM	SiCl4 pre valve closed
1/7/2011	3:52:47 PM	SiCl4 post valve closed
1/7/2011	3:52:47 PM	Bubbler valve closed
1/7/2011	3:52:47 PM	Helium valve opened
1/7/2011	3:52:47 PM	Main Vac valve opened
1/7/2011	3:52:47 PM	Bypass valve opened
1/7/2011	3:52:47 PM	Helium MFC set to  100.000000
1/7/2011	3:52:47 PM	H2 MFC set to  0.000000
1/7/2011	3:52:47 PM	BCl3 MFC set to  0.000000
1/7/2011	3:52:47 PM	PHl3 MFC set to  0.000000
1/7/2011	3:52:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:52:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:52:47 PM	Tube furnace set to 0
1/7/2011	3:53:47 PM	Helium valve closed
1/7/2011	3:53:47 PM	H2 valve closed
1/7/2011	3:53:47 PM	BCl3 valve closed
1/7/2011	3:53:47 PM	PH3 valve closed
1/7/2011	3:53:47 PM	SiCl4 pre valve closed
1/7/2011	3:53:47 PM	SiCl4 post valve closed
1/7/2011	3:53:47 PM	Bubbler valve closed
1/7/2011	3:53:47 PM	Main Vac valve opened
1/7/2011	3:53:47 PM	Bypass valve opened
1/7/2011	3:53:47 PM	Helium MFC set to  0.000000
1/7/2011	3:53:47 PM	H2 MFC set to  0.000000
1/7/2011	3:53:47 PM	BCl3 MFC set to  0.000000
1/7/2011	3:53:47 PM	PHl3 MFC set to  0.000000
1/7/2011	3:53:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:53:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:53:47 PM	Tube furnace set to 0
1/7/2011	3:54:47 PM	H2 valve closed
1/7/2011	3:54:47 PM	BCl3 valve closed
1/7/2011	3:54:47 PM	PH3 valve closed
1/7/2011	3:54:47 PM	SiCl4 pre valve closed
1/7/2011	3:54:47 PM	SiCl4 post valve closed
1/7/2011	3:54:47 PM	Bubbler valve closed
1/7/2011	3:54:47 PM	Helium valve opened
1/7/2011	3:54:47 PM	Main Vac valve opened
1/7/2011	3:54:47 PM	Bypass valve opened
1/7/2011	3:54:47 PM	Helium MFC set to  100.000000
1/7/2011	3:54:47 PM	H2 MFC set to  0.000000
1/7/2011	3:54:47 PM	BCl3 MFC set to  0.000000
1/7/2011	3:54:47 PM	PHl3 MFC set to  0.000000
1/7/2011	3:54:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:54:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:54:47 PM	Tube furnace set to 0
1/7/2011	3:55:47 PM	Helium valve closed
1/7/2011	3:55:47 PM	H2 valve closed
1/7/2011	3:55:47 PM	BCl3 valve closed
1/7/2011	3:55:47 PM	PH3 valve closed
1/7/2011	3:55:47 PM	SiCl4 pre valve closed
1/7/2011	3:55:47 PM	SiCl4 post valve closed
1/7/2011	3:55:47 PM	Bubbler valve closed
1/7/2011	3:55:47 PM	Main Vac valve opened
1/7/2011	3:55:47 PM	Bypass valve opened
1/7/2011	3:55:47 PM	Helium MFC set to  0.000000
1/7/2011	3:55:47 PM	H2 MFC set to  0.000000
1/7/2011	3:55:47 PM	BCl3 MFC set to  0.000000
1/7/2011	3:55:47 PM	PHl3 MFC set to  0.000000
1/7/2011	3:55:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:55:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:55:47 PM	Tube furnace set to 0
1/7/2011	3:56:47 PM	H2 valve closed
1/7/2011	3:56:47 PM	BCl3 valve closed
1/7/2011	3:56:47 PM	PH3 valve closed
1/7/2011	3:56:47 PM	SiCl4 pre valve closed
1/7/2011	3:56:47 PM	SiCl4 post valve closed
1/7/2011	3:56:47 PM	Bubbler valve closed
1/7/2011	3:56:47 PM	Helium valve opened
1/7/2011	3:56:47 PM	Main Vac valve opened
1/7/2011	3:56:47 PM	Bypass valve opened
1/7/2011	3:56:47 PM	Helium MFC set to  100.000000
1/7/2011	3:56:47 PM	H2 MFC set to  0.000000
1/7/2011	3:56:47 PM	BCl3 MFC set to  0.000000
1/7/2011	3:56:47 PM	PHl3 MFC set to  0.000000
1/7/2011	3:56:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:56:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:56:48 PM	Tube furnace set to 0
1/7/2011	3:57:48 PM	Helium valve closed
1/7/2011	3:57:48 PM	H2 valve closed
1/7/2011	3:57:48 PM	BCl3 valve closed
1/7/2011	3:57:48 PM	PH3 valve closed
1/7/2011	3:57:48 PM	SiCl4 pre valve closed
1/7/2011	3:57:48 PM	SiCl4 post valve closed
1/7/2011	3:57:48 PM	Bubbler valve closed
1/7/2011	3:57:48 PM	Main Vac valve opened
1/7/2011	3:57:48 PM	Bypass valve opened
1/7/2011	3:57:48 PM	Helium MFC set to  0.000000
1/7/2011	3:57:48 PM	H2 MFC set to  0.000000
1/7/2011	3:57:48 PM	BCl3 MFC set to  0.000000
1/7/2011	3:57:48 PM	PHl3 MFC set to  0.000000
1/7/2011	3:57:48 PM	SiCl4 MFC set to  0.000000
1/7/2011	3:57:48 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	3:57:48 PM	Tube furnace set to 0
1/7/2011	3:57:49 PM	Run finished at 3:57 PM
1/7/2011	3:57:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	4:01:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	4:01:28 PM	Recipe started at 4:01 PM
1/7/2011	4:01:28 PM	Helium valve closed
1/7/2011	4:01:28 PM	H2 valve closed
1/7/2011	4:01:28 PM	BCl3 valve closed
1/7/2011	4:01:28 PM	PH3 valve closed
1/7/2011	4:01:28 PM	SiCl4 pre valve closed
1/7/2011	4:01:28 PM	SiCl4 post valve closed
1/7/2011	4:01:28 PM	Main Vac valve closed
1/7/2011	4:01:28 PM	Bubbler valve closed
1/7/2011	4:01:28 PM	Bypass valve opened
1/7/2011	4:01:28 PM	Helium MFC set to  0.000000
1/7/2011	4:01:28 PM	H2 MFC set to  0.000000
1/7/2011	4:01:28 PM	BCl3 MFC set to  0.000000
1/7/2011	4:01:28 PM	PHl3 MFC set to  0.000000
1/7/2011	4:01:28 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:01:28 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:01:28 PM	Tube furnace set to 0
1/7/2011	4:01:29 PM	Helium valve closed
1/7/2011	4:01:29 PM	H2 valve closed
1/7/2011	4:01:29 PM	BCl3 valve closed
1/7/2011	4:01:29 PM	PH3 valve closed
1/7/2011	4:01:29 PM	SiCl4 pre valve closed
1/7/2011	4:01:29 PM	SiCl4 post valve closed
1/7/2011	4:01:29 PM	Bubbler valve closed
1/7/2011	4:01:29 PM	Main Vac valve opened
1/7/2011	4:01:29 PM	Bypass valve opened
1/7/2011	4:01:29 PM	Helium MFC set to  0.000000
1/7/2011	4:01:29 PM	H2 MFC set to  0.000000
1/7/2011	4:01:29 PM	BCl3 MFC set to  0.000000
1/7/2011	4:01:29 PM	PHl3 MFC set to  0.000000
1/7/2011	4:01:29 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:01:29 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:01:29 PM	Tube furnace set to 0
1/7/2011	4:02:29 PM	H2 valve closed
1/7/2011	4:02:29 PM	BCl3 valve closed
1/7/2011	4:02:29 PM	PH3 valve closed
1/7/2011	4:02:29 PM	SiCl4 pre valve closed
1/7/2011	4:02:29 PM	SiCl4 post valve closed
1/7/2011	4:02:29 PM	Bubbler valve closed
1/7/2011	4:02:29 PM	Helium valve opened
1/7/2011	4:02:29 PM	Main Vac valve opened
1/7/2011	4:02:29 PM	Bypass valve opened
1/7/2011	4:02:29 PM	Helium MFC set to  100.000000
1/7/2011	4:02:29 PM	H2 MFC set to  0.000000
1/7/2011	4:02:29 PM	BCl3 MFC set to  0.000000
1/7/2011	4:02:29 PM	PHl3 MFC set to  0.000000
1/7/2011	4:02:29 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:02:29 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:02:29 PM	Tube furnace set to 0
1/7/2011	4:03:29 PM	Helium valve closed
1/7/2011	4:03:29 PM	H2 valve closed
1/7/2011	4:03:29 PM	BCl3 valve closed
1/7/2011	4:03:29 PM	PH3 valve closed
1/7/2011	4:03:29 PM	SiCl4 pre valve closed
1/7/2011	4:03:29 PM	SiCl4 post valve closed
1/7/2011	4:03:29 PM	Bubbler valve closed
1/7/2011	4:03:29 PM	Main Vac valve opened
1/7/2011	4:03:29 PM	Bypass valve opened
1/7/2011	4:03:29 PM	Helium MFC set to  0.000000
1/7/2011	4:03:29 PM	H2 MFC set to  0.000000
1/7/2011	4:03:29 PM	BCl3 MFC set to  0.000000
1/7/2011	4:03:29 PM	PHl3 MFC set to  0.000000
1/7/2011	4:03:29 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:03:29 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:03:29 PM	Tube furnace set to 0
1/7/2011	4:04:29 PM	H2 valve closed
1/7/2011	4:04:29 PM	BCl3 valve closed
1/7/2011	4:04:29 PM	PH3 valve closed
1/7/2011	4:04:29 PM	SiCl4 pre valve closed
1/7/2011	4:04:29 PM	SiCl4 post valve closed
1/7/2011	4:04:29 PM	Bubbler valve closed
1/7/2011	4:04:29 PM	Helium valve opened
1/7/2011	4:04:29 PM	Main Vac valve opened
1/7/2011	4:04:29 PM	Bypass valve opened
1/7/2011	4:04:29 PM	Helium MFC set to  100.000000
1/7/2011	4:04:29 PM	H2 MFC set to  0.000000
1/7/2011	4:04:29 PM	BCl3 MFC set to  0.000000
1/7/2011	4:04:29 PM	PHl3 MFC set to  0.000000
1/7/2011	4:04:29 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:04:29 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:04:29 PM	Tube furnace set to 0
1/7/2011	4:05:29 PM	Helium valve closed
1/7/2011	4:05:29 PM	H2 valve closed
1/7/2011	4:05:29 PM	BCl3 valve closed
1/7/2011	4:05:29 PM	PH3 valve closed
1/7/2011	4:05:29 PM	SiCl4 pre valve closed
1/7/2011	4:05:29 PM	SiCl4 post valve closed
1/7/2011	4:05:29 PM	Bubbler valve closed
1/7/2011	4:05:29 PM	Main Vac valve opened
1/7/2011	4:05:29 PM	Bypass valve opened
1/7/2011	4:05:29 PM	Helium MFC set to  0.000000
1/7/2011	4:05:29 PM	H2 MFC set to  0.000000
1/7/2011	4:05:29 PM	BCl3 MFC set to  0.000000
1/7/2011	4:05:29 PM	PHl3 MFC set to  0.000000
1/7/2011	4:05:29 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:05:29 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:05:30 PM	Tube furnace set to 0
1/7/2011	4:06:30 PM	H2 valve closed
1/7/2011	4:06:30 PM	BCl3 valve closed
1/7/2011	4:06:30 PM	PH3 valve closed
1/7/2011	4:06:30 PM	SiCl4 pre valve closed
1/7/2011	4:06:30 PM	SiCl4 post valve closed
1/7/2011	4:06:30 PM	Bubbler valve closed
1/7/2011	4:06:30 PM	Helium valve opened
1/7/2011	4:06:30 PM	Main Vac valve opened
1/7/2011	4:06:30 PM	Bypass valve opened
1/7/2011	4:06:30 PM	Helium MFC set to  100.000000
1/7/2011	4:06:30 PM	H2 MFC set to  0.000000
1/7/2011	4:06:30 PM	BCl3 MFC set to  0.000000
1/7/2011	4:06:30 PM	PHl3 MFC set to  0.000000
1/7/2011	4:06:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:06:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:06:30 PM	Tube furnace set to 0
1/7/2011	4:07:30 PM	Helium valve closed
1/7/2011	4:07:30 PM	H2 valve closed
1/7/2011	4:07:30 PM	BCl3 valve closed
1/7/2011	4:07:30 PM	PH3 valve closed
1/7/2011	4:07:30 PM	SiCl4 pre valve closed
1/7/2011	4:07:30 PM	SiCl4 post valve closed
1/7/2011	4:07:30 PM	Bubbler valve closed
1/7/2011	4:07:30 PM	Main Vac valve opened
1/7/2011	4:07:30 PM	Bypass valve opened
1/7/2011	4:07:30 PM	Helium MFC set to  0.000000
1/7/2011	4:07:30 PM	H2 MFC set to  0.000000
1/7/2011	4:07:30 PM	BCl3 MFC set to  0.000000
1/7/2011	4:07:30 PM	PHl3 MFC set to  0.000000
1/7/2011	4:07:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:07:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:07:30 PM	Tube furnace set to 0
1/7/2011	4:08:30 PM	H2 valve closed
1/7/2011	4:08:30 PM	BCl3 valve closed
1/7/2011	4:08:30 PM	PH3 valve closed
1/7/2011	4:08:30 PM	SiCl4 pre valve closed
1/7/2011	4:08:30 PM	SiCl4 post valve closed
1/7/2011	4:08:30 PM	Bubbler valve closed
1/7/2011	4:08:30 PM	Helium valve opened
1/7/2011	4:08:30 PM	Main Vac valve opened
1/7/2011	4:08:30 PM	Bypass valve opened
1/7/2011	4:08:30 PM	Helium MFC set to  100.000000
1/7/2011	4:08:30 PM	H2 MFC set to  0.000000
1/7/2011	4:08:30 PM	BCl3 MFC set to  0.000000
1/7/2011	4:08:30 PM	PHl3 MFC set to  0.000000
1/7/2011	4:08:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:08:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:08:30 PM	Tube furnace set to 0
1/7/2011	4:09:30 PM	Helium valve closed
1/7/2011	4:09:30 PM	H2 valve closed
1/7/2011	4:09:30 PM	BCl3 valve closed
1/7/2011	4:09:30 PM	PH3 valve closed
1/7/2011	4:09:30 PM	SiCl4 pre valve closed
1/7/2011	4:09:30 PM	SiCl4 post valve closed
1/7/2011	4:09:30 PM	Bubbler valve closed
1/7/2011	4:09:30 PM	Main Vac valve opened
1/7/2011	4:09:30 PM	Bypass valve opened
1/7/2011	4:09:30 PM	Helium MFC set to  0.000000
1/7/2011	4:09:30 PM	H2 MFC set to  0.000000
1/7/2011	4:09:30 PM	BCl3 MFC set to  0.000000
1/7/2011	4:09:30 PM	PHl3 MFC set to  0.000000
1/7/2011	4:09:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:09:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:09:30 PM	Tube furnace set to 0
1/7/2011	4:10:30 PM	H2 valve closed
1/7/2011	4:10:30 PM	BCl3 valve closed
1/7/2011	4:10:30 PM	PH3 valve closed
1/7/2011	4:10:30 PM	SiCl4 pre valve closed
1/7/2011	4:10:30 PM	SiCl4 post valve closed
1/7/2011	4:10:30 PM	Bubbler valve closed
1/7/2011	4:10:30 PM	Helium valve opened
1/7/2011	4:10:30 PM	Main Vac valve opened
1/7/2011	4:10:30 PM	Bypass valve opened
1/7/2011	4:10:30 PM	Helium MFC set to  100.000000
1/7/2011	4:10:30 PM	H2 MFC set to  0.000000
1/7/2011	4:10:30 PM	BCl3 MFC set to  0.000000
1/7/2011	4:10:30 PM	PHl3 MFC set to  0.000000
1/7/2011	4:10:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:10:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:10:31 PM	Tube furnace set to 0
1/7/2011	4:11:31 PM	Helium valve closed
1/7/2011	4:11:31 PM	H2 valve closed
1/7/2011	4:11:31 PM	BCl3 valve closed
1/7/2011	4:11:31 PM	PH3 valve closed
1/7/2011	4:11:31 PM	SiCl4 pre valve closed
1/7/2011	4:11:31 PM	SiCl4 post valve closed
1/7/2011	4:11:31 PM	Bubbler valve closed
1/7/2011	4:11:31 PM	Main Vac valve opened
1/7/2011	4:11:31 PM	Bypass valve opened
1/7/2011	4:11:31 PM	Helium MFC set to  0.000000
1/7/2011	4:11:31 PM	H2 MFC set to  0.000000
1/7/2011	4:11:31 PM	BCl3 MFC set to  0.000000
1/7/2011	4:11:31 PM	PHl3 MFC set to  0.000000
1/7/2011	4:11:31 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:11:31 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:11:31 PM	Tube furnace set to 0
1/7/2011	4:12:31 PM	H2 valve closed
1/7/2011	4:12:31 PM	BCl3 valve closed
1/7/2011	4:12:31 PM	PH3 valve closed
1/7/2011	4:12:31 PM	SiCl4 pre valve closed
1/7/2011	4:12:31 PM	SiCl4 post valve closed
1/7/2011	4:12:31 PM	Bubbler valve closed
1/7/2011	4:12:31 PM	Helium valve opened
1/7/2011	4:12:31 PM	Main Vac valve opened
1/7/2011	4:12:31 PM	Bypass valve opened
1/7/2011	4:12:31 PM	Helium MFC set to  100.000000
1/7/2011	4:12:31 PM	H2 MFC set to  0.000000
1/7/2011	4:12:31 PM	BCl3 MFC set to  0.000000
1/7/2011	4:12:31 PM	PHl3 MFC set to  0.000000
1/7/2011	4:12:31 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:12:31 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:12:31 PM	Tube furnace set to 0
1/7/2011	4:13:31 PM	Helium valve closed
1/7/2011	4:13:31 PM	H2 valve closed
1/7/2011	4:13:31 PM	BCl3 valve closed
1/7/2011	4:13:31 PM	PH3 valve closed
1/7/2011	4:13:31 PM	SiCl4 pre valve closed
1/7/2011	4:13:31 PM	SiCl4 post valve closed
1/7/2011	4:13:31 PM	Bubbler valve closed
1/7/2011	4:13:31 PM	Main Vac valve opened
1/7/2011	4:13:31 PM	Bypass valve opened
1/7/2011	4:13:31 PM	Helium MFC set to  0.000000
1/7/2011	4:13:31 PM	H2 MFC set to  0.000000
1/7/2011	4:13:31 PM	BCl3 MFC set to  0.000000
1/7/2011	4:13:31 PM	PHl3 MFC set to  0.000000
1/7/2011	4:13:31 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:13:31 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:13:31 PM	Tube furnace set to 0
1/7/2011	4:14:31 PM	H2 valve closed
1/7/2011	4:14:31 PM	BCl3 valve closed
1/7/2011	4:14:31 PM	PH3 valve closed
1/7/2011	4:14:31 PM	SiCl4 pre valve closed
1/7/2011	4:14:31 PM	SiCl4 post valve closed
1/7/2011	4:14:31 PM	Bubbler valve closed
1/7/2011	4:14:31 PM	Helium valve opened
1/7/2011	4:14:31 PM	Main Vac valve opened
1/7/2011	4:14:31 PM	Bypass valve opened
1/7/2011	4:14:31 PM	Helium MFC set to  100.000000
1/7/2011	4:14:31 PM	H2 MFC set to  0.000000
1/7/2011	4:14:31 PM	BCl3 MFC set to  0.000000
1/7/2011	4:14:31 PM	PHl3 MFC set to  0.000000
1/7/2011	4:14:31 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:14:31 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:14:31 PM	Tube furnace set to 0
1/7/2011	4:15:31 PM	Helium valve closed
1/7/2011	4:15:31 PM	H2 valve closed
1/7/2011	4:15:31 PM	BCl3 valve closed
1/7/2011	4:15:31 PM	PH3 valve closed
1/7/2011	4:15:31 PM	SiCl4 pre valve closed
1/7/2011	4:15:31 PM	SiCl4 post valve closed
1/7/2011	4:15:31 PM	Bubbler valve closed
1/7/2011	4:15:31 PM	Main Vac valve opened
1/7/2011	4:15:31 PM	Bypass valve opened
1/7/2011	4:15:31 PM	Helium MFC set to  0.000000
1/7/2011	4:15:31 PM	H2 MFC set to  0.000000
1/7/2011	4:15:31 PM	BCl3 MFC set to  0.000000
1/7/2011	4:15:31 PM	PHl3 MFC set to  0.000000
1/7/2011	4:15:31 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:15:31 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:15:32 PM	Tube furnace set to 0
1/7/2011	4:16:32 PM	H2 valve closed
1/7/2011	4:16:32 PM	BCl3 valve closed
1/7/2011	4:16:32 PM	PH3 valve closed
1/7/2011	4:16:32 PM	SiCl4 pre valve closed
1/7/2011	4:16:32 PM	SiCl4 post valve closed
1/7/2011	4:16:32 PM	Bubbler valve closed
1/7/2011	4:16:32 PM	Helium valve opened
1/7/2011	4:16:32 PM	Main Vac valve opened
1/7/2011	4:16:32 PM	Bypass valve opened
1/7/2011	4:16:32 PM	Helium MFC set to  100.000000
1/7/2011	4:16:32 PM	H2 MFC set to  0.000000
1/7/2011	4:16:32 PM	BCl3 MFC set to  0.000000
1/7/2011	4:16:32 PM	PHl3 MFC set to  0.000000
1/7/2011	4:16:32 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:16:32 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:16:32 PM	Tube furnace set to 0
1/7/2011	4:17:32 PM	Helium valve closed
1/7/2011	4:17:32 PM	H2 valve closed
1/7/2011	4:17:32 PM	BCl3 valve closed
1/7/2011	4:17:32 PM	PH3 valve closed
1/7/2011	4:17:32 PM	SiCl4 pre valve closed
1/7/2011	4:17:32 PM	SiCl4 post valve closed
1/7/2011	4:17:32 PM	Bubbler valve closed
1/7/2011	4:17:32 PM	Main Vac valve opened
1/7/2011	4:17:32 PM	Bypass valve opened
1/7/2011	4:17:32 PM	Helium MFC set to  0.000000
1/7/2011	4:17:32 PM	H2 MFC set to  0.000000
1/7/2011	4:17:32 PM	BCl3 MFC set to  0.000000
1/7/2011	4:17:32 PM	PHl3 MFC set to  0.000000
1/7/2011	4:17:32 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:17:32 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:17:32 PM	Tube furnace set to 0
1/7/2011	4:18:32 PM	H2 valve closed
1/7/2011	4:18:32 PM	BCl3 valve closed
1/7/2011	4:18:32 PM	PH3 valve closed
1/7/2011	4:18:32 PM	SiCl4 pre valve closed
1/7/2011	4:18:32 PM	SiCl4 post valve closed
1/7/2011	4:18:32 PM	Bubbler valve closed
1/7/2011	4:18:32 PM	Helium valve opened
1/7/2011	4:18:32 PM	Main Vac valve opened
1/7/2011	4:18:32 PM	Bypass valve opened
1/7/2011	4:18:32 PM	Helium MFC set to  100.000000
1/7/2011	4:18:32 PM	H2 MFC set to  0.000000
1/7/2011	4:18:32 PM	BCl3 MFC set to  0.000000
1/7/2011	4:18:32 PM	PHl3 MFC set to  0.000000
1/7/2011	4:18:32 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:18:32 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:18:32 PM	Tube furnace set to 0
1/7/2011	4:19:32 PM	Helium valve closed
1/7/2011	4:19:32 PM	H2 valve closed
1/7/2011	4:19:32 PM	BCl3 valve closed
1/7/2011	4:19:32 PM	PH3 valve closed
1/7/2011	4:19:32 PM	SiCl4 pre valve closed
1/7/2011	4:19:32 PM	SiCl4 post valve closed
1/7/2011	4:19:32 PM	Bubbler valve closed
1/7/2011	4:19:32 PM	Main Vac valve opened
1/7/2011	4:19:32 PM	Bypass valve opened
1/7/2011	4:19:32 PM	Helium MFC set to  0.000000
1/7/2011	4:19:32 PM	H2 MFC set to  0.000000
1/7/2011	4:19:32 PM	BCl3 MFC set to  0.000000
1/7/2011	4:19:32 PM	PHl3 MFC set to  0.000000
1/7/2011	4:19:32 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:19:32 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:19:32 PM	Tube furnace set to 0
1/7/2011	4:20:32 PM	H2 valve closed
1/7/2011	4:20:32 PM	BCl3 valve closed
1/7/2011	4:20:32 PM	PH3 valve closed
1/7/2011	4:20:32 PM	SiCl4 pre valve closed
1/7/2011	4:20:32 PM	SiCl4 post valve closed
1/7/2011	4:20:32 PM	Bubbler valve closed
1/7/2011	4:20:32 PM	Helium valve opened
1/7/2011	4:20:32 PM	Main Vac valve opened
1/7/2011	4:20:32 PM	Bypass valve opened
1/7/2011	4:20:32 PM	Helium MFC set to  100.000000
1/7/2011	4:20:32 PM	H2 MFC set to  0.000000
1/7/2011	4:20:32 PM	BCl3 MFC set to  0.000000
1/7/2011	4:20:32 PM	PHl3 MFC set to  0.000000
1/7/2011	4:20:32 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:20:32 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:20:33 PM	Tube furnace set to 0
1/7/2011	4:21:33 PM	Helium valve closed
1/7/2011	4:21:33 PM	H2 valve closed
1/7/2011	4:21:33 PM	BCl3 valve closed
1/7/2011	4:21:33 PM	PH3 valve closed
1/7/2011	4:21:33 PM	SiCl4 pre valve closed
1/7/2011	4:21:33 PM	SiCl4 post valve closed
1/7/2011	4:21:33 PM	Bubbler valve closed
1/7/2011	4:21:33 PM	Main Vac valve opened
1/7/2011	4:21:33 PM	Bypass valve opened
1/7/2011	4:21:33 PM	Helium MFC set to  0.000000
1/7/2011	4:21:33 PM	H2 MFC set to  0.000000
1/7/2011	4:21:33 PM	BCl3 MFC set to  0.000000
1/7/2011	4:21:33 PM	PHl3 MFC set to  0.000000
1/7/2011	4:21:33 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:21:33 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:21:33 PM	Tube furnace set to 0
1/7/2011	4:21:34 PM	Run finished at 4:21 PM
1/7/2011	4:21:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	4:28:10 PM	Recipe started at 4:28 PM
1/7/2011	4:28:10 PM	Helium valve closed
1/7/2011	4:28:10 PM	BCl3 valve closed
1/7/2011	4:28:10 PM	PH3 valve closed
1/7/2011	4:28:10 PM	SiCl4 pre valve closed
1/7/2011	4:28:10 PM	SiCl4 post valve closed
1/7/2011	4:28:10 PM	Main Vac valve closed
1/7/2011	4:28:10 PM	Bypass valve closed
1/7/2011	4:28:10 PM	Bubbler valve closed
1/7/2011	4:28:10 PM	H2 valve opened
1/7/2011	4:28:10 PM	Helium MFC set to  0.000000
1/7/2011	4:28:10 PM	H2 MFC set to  500.000000
1/7/2011	4:28:10 PM	BCl3 MFC set to  0.000000
1/7/2011	4:28:10 PM	PHl3 MFC set to  0.000000
1/7/2011	4:28:10 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:28:10 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:28:10 PM	Tube furnace set to 0
1/7/2011	4:29:30 PM	Helium valve closed
1/7/2011	4:29:30 PM	BCl3 valve closed
1/7/2011	4:29:30 PM	PH3 valve closed
1/7/2011	4:29:30 PM	SiCl4 pre valve closed
1/7/2011	4:29:30 PM	SiCl4 post valve closed
1/7/2011	4:29:30 PM	Main Vac valve closed
1/7/2011	4:29:30 PM	Bypass valve closed
1/7/2011	4:29:30 PM	H2 valve opened
1/7/2011	4:29:30 PM	Bubbler valve opened
1/7/2011	4:29:30 PM	Helium MFC set to  0.000000
1/7/2011	4:29:30 PM	H2 MFC set to  500.000000
1/7/2011	4:29:30 PM	BCl3 MFC set to  0.000000
1/7/2011	4:29:30 PM	PHl3 MFC set to  0.000000
1/7/2011	4:29:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	4:29:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:29:30 PM	Tube furnace set to 1050
1/7/2011	4:49:30 PM	Helium valve closed
1/7/2011	4:49:30 PM	PH3 valve closed
1/7/2011	4:49:30 PM	Main Vac valve closed
1/7/2011	4:49:30 PM	Bypass valve closed
1/7/2011	4:49:30 PM	H2 valve opened
1/7/2011	4:49:30 PM	BCl3 valve opened
1/7/2011	4:49:30 PM	SiCl4 pre valve opened
1/7/2011	4:49:30 PM	SiCl4 post valve opened
1/7/2011	4:49:30 PM	Bubbler valve opened
1/7/2011	4:49:30 PM	Helium MFC set to  0.000000
1/7/2011	4:49:30 PM	H2 MFC set to  500.000000
1/7/2011	4:49:30 PM	BCl3 MFC set to  1.800000
1/7/2011	4:49:30 PM	PHl3 MFC set to  0.000000
1/7/2011	4:49:30 PM	SiCl4 MFC set to  50.000000
1/7/2011	4:49:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	4:49:30 PM	Tube furnace set to 1050
1/7/2011	5:09:30 PM	H2 valve closed
1/7/2011	5:09:30 PM	BCl3 valve closed
1/7/2011	5:09:30 PM	PH3 valve closed
1/7/2011	5:09:30 PM	SiCl4 pre valve closed
1/7/2011	5:09:30 PM	SiCl4 post valve closed
1/7/2011	5:09:30 PM	Main Vac valve closed
1/7/2011	5:09:30 PM	Bypass valve closed
1/7/2011	5:09:30 PM	Helium valve opened
1/7/2011	5:09:30 PM	Bubbler valve opened
1/7/2011	5:09:30 PM	Helium MFC set to  500.000000
1/7/2011	5:09:30 PM	H2 MFC set to  0.000000
1/7/2011	5:09:30 PM	BCl3 MFC set to  0.000000
1/7/2011	5:09:30 PM	PHl3 MFC set to  0.000000
1/7/2011	5:09:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:09:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:09:30 PM	Tube furnace set to 0
1/7/2011	5:29:30 PM	Helium valve closed
1/7/2011	5:29:30 PM	H2 valve closed
1/7/2011	5:29:30 PM	BCl3 valve closed
1/7/2011	5:29:30 PM	PH3 valve closed
1/7/2011	5:29:30 PM	SiCl4 pre valve closed
1/7/2011	5:29:30 PM	SiCl4 post valve closed
1/7/2011	5:29:30 PM	Main Vac valve closed
1/7/2011	5:29:30 PM	Bypass valve closed
1/7/2011	5:29:30 PM	Bubbler valve closed
1/7/2011	5:29:30 PM	Helium MFC set to  0.000000
1/7/2011	5:29:30 PM	H2 MFC set to  0.000000
1/7/2011	5:29:30 PM	BCl3 MFC set to  0.000000
1/7/2011	5:29:30 PM	PHl3 MFC set to  0.000000
1/7/2011	5:29:30 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:29:30 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:29:31 PM	Tube furnace set to 0
1/7/2011	5:29:31 PM	Run finished at 5:29 PM
1/7/2011	5:35:46 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	5:35:46 PM	Recipe started at 5:35 PM
1/7/2011	5:35:46 PM	H2 valve closed
1/7/2011	5:35:46 PM	BCl3 valve closed
1/7/2011	5:35:46 PM	PH3 valve closed
1/7/2011	5:35:46 PM	SiCl4 pre valve closed
1/7/2011	5:35:46 PM	SiCl4 post valve closed
1/7/2011	5:35:46 PM	Main Vac valve closed
1/7/2011	5:35:46 PM	Bypass valve closed
1/7/2011	5:35:46 PM	Bubbler valve closed
1/7/2011	5:35:46 PM	Helium valve opened
1/7/2011	5:35:46 PM	Helium MFC set to  500.000000
1/7/2011	5:35:46 PM	H2 MFC set to  0.000000
1/7/2011	5:35:46 PM	BCl3 MFC set to  0.000000
1/7/2011	5:35:46 PM	PHl3 MFC set to  0.000000
1/7/2011	5:35:46 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:35:46 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:35:46 PM	Tube furnace set to 0
1/7/2011	5:35:49 PM	Helium valve closed
1/7/2011	5:35:49 PM	H2 valve closed
1/7/2011	5:35:49 PM	BCl3 valve closed
1/7/2011	5:35:49 PM	PH3 valve closed
1/7/2011	5:35:49 PM	SiCl4 pre valve closed
1/7/2011	5:35:49 PM	SiCl4 post valve closed
1/7/2011	5:35:49 PM	Main Vac valve closed
1/7/2011	5:35:49 PM	Bypass valve closed
1/7/2011	5:35:49 PM	Bubbler valve closed
1/7/2011	5:35:49 PM	Helium MFC set to  0.000000
1/7/2011	5:35:49 PM	H2 MFC set to  0.000000
1/7/2011	5:35:49 PM	BCl3 MFC set to  0.000000
1/7/2011	5:35:49 PM	PHl3 MFC set to  0.000000
1/7/2011	5:35:49 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:35:49 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:35:49 PM	Tube furnace set to 0
1/7/2011	5:35:49 PM	Run finished at 5:35 PM
1/7/2011	5:35:49 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	5:41:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	5:41:25 PM	Recipe started at 5:41 PM
1/7/2011	5:41:25 PM	Helium valve closed
1/7/2011	5:41:25 PM	H2 valve closed
1/7/2011	5:41:25 PM	BCl3 valve closed
1/7/2011	5:41:25 PM	PH3 valve closed
1/7/2011	5:41:25 PM	SiCl4 pre valve closed
1/7/2011	5:41:25 PM	SiCl4 post valve closed
1/7/2011	5:41:25 PM	Main Vac valve closed
1/7/2011	5:41:25 PM	Bubbler valve closed
1/7/2011	5:41:25 PM	Bypass valve opened
1/7/2011	5:41:25 PM	Helium MFC set to  0.000000
1/7/2011	5:41:25 PM	H2 MFC set to  0.000000
1/7/2011	5:41:25 PM	BCl3 MFC set to  0.000000
1/7/2011	5:41:25 PM	PHl3 MFC set to  0.000000
1/7/2011	5:41:25 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:41:25 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:41:25 PM	Tube furnace set to 0
1/7/2011	5:42:24 PM	Helium valve closed
1/7/2011	5:42:24 PM	H2 valve closed
1/7/2011	5:42:24 PM	BCl3 valve closed
1/7/2011	5:42:24 PM	PH3 valve closed
1/7/2011	5:42:24 PM	SiCl4 pre valve closed
1/7/2011	5:42:24 PM	SiCl4 post valve closed
1/7/2011	5:42:24 PM	Bubbler valve closed
1/7/2011	5:42:24 PM	Main Vac valve opened
1/7/2011	5:42:24 PM	Bypass valve opened
1/7/2011	5:42:24 PM	Helium MFC set to  0.000000
1/7/2011	5:42:24 PM	H2 MFC set to  0.000000
1/7/2011	5:42:24 PM	BCl3 MFC set to  0.000000
1/7/2011	5:42:24 PM	PHl3 MFC set to  0.000000
1/7/2011	5:42:24 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:42:24 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:42:25 PM	Tube furnace set to 0
1/7/2011	5:42:25 PM	Run finished at 5:42 PM
1/7/2011	5:42:25 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	5:42:58 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	5:43:11 PM	Recipe started at 5:43 PM
1/7/2011	5:43:11 PM	Helium valve closed
1/7/2011	5:43:11 PM	H2 valve closed
1/7/2011	5:43:11 PM	BCl3 valve closed
1/7/2011	5:43:11 PM	PH3 valve closed
1/7/2011	5:43:11 PM	SiCl4 pre valve closed
1/7/2011	5:43:11 PM	SiCl4 post valve closed
1/7/2011	5:43:11 PM	Main Vac valve closed
1/7/2011	5:43:11 PM	Bubbler valve closed
1/7/2011	5:43:11 PM	Bypass valve opened
1/7/2011	5:43:11 PM	Helium MFC set to  0.000000
1/7/2011	5:43:11 PM	H2 MFC set to  0.000000
1/7/2011	5:43:11 PM	BCl3 MFC set to  0.000000
1/7/2011	5:43:11 PM	PHl3 MFC set to  0.000000
1/7/2011	5:43:11 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:43:11 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:43:11 PM	Tube furnace set to 0
1/7/2011	5:43:11 PM	Helium valve closed
1/7/2011	5:43:11 PM	H2 valve closed
1/7/2011	5:43:11 PM	BCl3 valve closed
1/7/2011	5:43:11 PM	PH3 valve closed
1/7/2011	5:43:11 PM	SiCl4 pre valve closed
1/7/2011	5:43:11 PM	SiCl4 post valve closed
1/7/2011	5:43:11 PM	Bubbler valve closed
1/7/2011	5:43:11 PM	Main Vac valve opened
1/7/2011	5:43:11 PM	Bypass valve opened
1/7/2011	5:43:11 PM	Helium MFC set to  0.000000
1/7/2011	5:43:11 PM	H2 MFC set to  0.000000
1/7/2011	5:43:11 PM	BCl3 MFC set to  0.000000
1/7/2011	5:43:11 PM	PHl3 MFC set to  0.000000
1/7/2011	5:43:11 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:43:11 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:43:11 PM	Tube furnace set to 0
1/7/2011	5:44:11 PM	H2 valve closed
1/7/2011	5:44:11 PM	BCl3 valve closed
1/7/2011	5:44:11 PM	PH3 valve closed
1/7/2011	5:44:11 PM	SiCl4 pre valve closed
1/7/2011	5:44:11 PM	SiCl4 post valve closed
1/7/2011	5:44:11 PM	Bubbler valve closed
1/7/2011	5:44:11 PM	Helium valve opened
1/7/2011	5:44:11 PM	Main Vac valve opened
1/7/2011	5:44:11 PM	Bypass valve opened
1/7/2011	5:44:11 PM	Helium MFC set to  100.000000
1/7/2011	5:44:11 PM	H2 MFC set to  0.000000
1/7/2011	5:44:11 PM	BCl3 MFC set to  0.000000
1/7/2011	5:44:11 PM	PHl3 MFC set to  0.000000
1/7/2011	5:44:11 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:44:11 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:44:12 PM	Tube furnace set to 0
1/7/2011	5:45:12 PM	Helium valve closed
1/7/2011	5:45:12 PM	H2 valve closed
1/7/2011	5:45:12 PM	BCl3 valve closed
1/7/2011	5:45:12 PM	PH3 valve closed
1/7/2011	5:45:12 PM	SiCl4 pre valve closed
1/7/2011	5:45:12 PM	SiCl4 post valve closed
1/7/2011	5:45:12 PM	Bubbler valve closed
1/7/2011	5:45:12 PM	Main Vac valve opened
1/7/2011	5:45:12 PM	Bypass valve opened
1/7/2011	5:45:12 PM	Helium MFC set to  0.000000
1/7/2011	5:45:12 PM	H2 MFC set to  0.000000
1/7/2011	5:45:12 PM	BCl3 MFC set to  0.000000
1/7/2011	5:45:12 PM	PHl3 MFC set to  0.000000
1/7/2011	5:45:12 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:45:12 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:45:12 PM	Tube furnace set to 0
1/7/2011	5:46:12 PM	H2 valve closed
1/7/2011	5:46:12 PM	BCl3 valve closed
1/7/2011	5:46:12 PM	PH3 valve closed
1/7/2011	5:46:12 PM	SiCl4 pre valve closed
1/7/2011	5:46:12 PM	SiCl4 post valve closed
1/7/2011	5:46:12 PM	Bubbler valve closed
1/7/2011	5:46:12 PM	Helium valve opened
1/7/2011	5:46:12 PM	Main Vac valve opened
1/7/2011	5:46:12 PM	Bypass valve opened
1/7/2011	5:46:12 PM	Helium MFC set to  100.000000
1/7/2011	5:46:12 PM	H2 MFC set to  0.000000
1/7/2011	5:46:12 PM	BCl3 MFC set to  0.000000
1/7/2011	5:46:12 PM	PHl3 MFC set to  0.000000
1/7/2011	5:46:12 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:46:12 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:46:12 PM	Tube furnace set to 0
1/7/2011	5:47:12 PM	Helium valve closed
1/7/2011	5:47:12 PM	H2 valve closed
1/7/2011	5:47:12 PM	BCl3 valve closed
1/7/2011	5:47:12 PM	PH3 valve closed
1/7/2011	5:47:12 PM	SiCl4 pre valve closed
1/7/2011	5:47:12 PM	SiCl4 post valve closed
1/7/2011	5:47:12 PM	Bubbler valve closed
1/7/2011	5:47:12 PM	Main Vac valve opened
1/7/2011	5:47:12 PM	Bypass valve opened
1/7/2011	5:47:12 PM	Helium MFC set to  0.000000
1/7/2011	5:47:12 PM	H2 MFC set to  0.000000
1/7/2011	5:47:12 PM	BCl3 MFC set to  0.000000
1/7/2011	5:47:12 PM	PHl3 MFC set to  0.000000
1/7/2011	5:47:12 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:47:12 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:47:12 PM	Tube furnace set to 0
1/7/2011	5:48:12 PM	H2 valve closed
1/7/2011	5:48:12 PM	BCl3 valve closed
1/7/2011	5:48:12 PM	PH3 valve closed
1/7/2011	5:48:12 PM	SiCl4 pre valve closed
1/7/2011	5:48:12 PM	SiCl4 post valve closed
1/7/2011	5:48:12 PM	Bubbler valve closed
1/7/2011	5:48:12 PM	Helium valve opened
1/7/2011	5:48:12 PM	Main Vac valve opened
1/7/2011	5:48:12 PM	Bypass valve opened
1/7/2011	5:48:12 PM	Helium MFC set to  100.000000
1/7/2011	5:48:12 PM	H2 MFC set to  0.000000
1/7/2011	5:48:12 PM	BCl3 MFC set to  0.000000
1/7/2011	5:48:12 PM	PHl3 MFC set to  0.000000
1/7/2011	5:48:12 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:48:12 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:48:12 PM	Tube furnace set to 0
1/7/2011	5:49:12 PM	Helium valve closed
1/7/2011	5:49:12 PM	H2 valve closed
1/7/2011	5:49:12 PM	BCl3 valve closed
1/7/2011	5:49:12 PM	PH3 valve closed
1/7/2011	5:49:12 PM	SiCl4 pre valve closed
1/7/2011	5:49:12 PM	SiCl4 post valve closed
1/7/2011	5:49:12 PM	Bubbler valve closed
1/7/2011	5:49:12 PM	Main Vac valve opened
1/7/2011	5:49:12 PM	Bypass valve opened
1/7/2011	5:49:12 PM	Helium MFC set to  0.000000
1/7/2011	5:49:12 PM	H2 MFC set to  0.000000
1/7/2011	5:49:12 PM	BCl3 MFC set to  0.000000
1/7/2011	5:49:12 PM	PHl3 MFC set to  0.000000
1/7/2011	5:49:12 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:49:12 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:49:13 PM	Tube furnace set to 0
1/7/2011	5:50:13 PM	H2 valve closed
1/7/2011	5:50:13 PM	BCl3 valve closed
1/7/2011	5:50:13 PM	PH3 valve closed
1/7/2011	5:50:13 PM	SiCl4 pre valve closed
1/7/2011	5:50:13 PM	SiCl4 post valve closed
1/7/2011	5:50:13 PM	Bubbler valve closed
1/7/2011	5:50:13 PM	Helium valve opened
1/7/2011	5:50:13 PM	Main Vac valve opened
1/7/2011	5:50:13 PM	Bypass valve opened
1/7/2011	5:50:13 PM	Helium MFC set to  100.000000
1/7/2011	5:50:13 PM	H2 MFC set to  0.000000
1/7/2011	5:50:13 PM	BCl3 MFC set to  0.000000
1/7/2011	5:50:13 PM	PHl3 MFC set to  0.000000
1/7/2011	5:50:13 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:50:13 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:50:13 PM	Tube furnace set to 0
1/7/2011	5:51:13 PM	Helium valve closed
1/7/2011	5:51:13 PM	H2 valve closed
1/7/2011	5:51:13 PM	BCl3 valve closed
1/7/2011	5:51:13 PM	PH3 valve closed
1/7/2011	5:51:13 PM	SiCl4 pre valve closed
1/7/2011	5:51:13 PM	SiCl4 post valve closed
1/7/2011	5:51:13 PM	Bubbler valve closed
1/7/2011	5:51:13 PM	Main Vac valve opened
1/7/2011	5:51:13 PM	Bypass valve opened
1/7/2011	5:51:13 PM	Helium MFC set to  0.000000
1/7/2011	5:51:13 PM	H2 MFC set to  0.000000
1/7/2011	5:51:13 PM	BCl3 MFC set to  0.000000
1/7/2011	5:51:13 PM	PHl3 MFC set to  0.000000
1/7/2011	5:51:13 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:51:13 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:51:13 PM	Tube furnace set to 0
1/7/2011	5:52:13 PM	H2 valve closed
1/7/2011	5:52:13 PM	BCl3 valve closed
1/7/2011	5:52:13 PM	PH3 valve closed
1/7/2011	5:52:13 PM	SiCl4 pre valve closed
1/7/2011	5:52:13 PM	SiCl4 post valve closed
1/7/2011	5:52:13 PM	Bubbler valve closed
1/7/2011	5:52:13 PM	Helium valve opened
1/7/2011	5:52:13 PM	Main Vac valve opened
1/7/2011	5:52:13 PM	Bypass valve opened
1/7/2011	5:52:13 PM	Helium MFC set to  100.000000
1/7/2011	5:52:13 PM	H2 MFC set to  0.000000
1/7/2011	5:52:13 PM	BCl3 MFC set to  0.000000
1/7/2011	5:52:13 PM	PHl3 MFC set to  0.000000
1/7/2011	5:52:13 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:52:13 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:52:13 PM	Tube furnace set to 0
1/7/2011	5:53:13 PM	Helium valve closed
1/7/2011	5:53:13 PM	H2 valve closed
1/7/2011	5:53:13 PM	BCl3 valve closed
1/7/2011	5:53:13 PM	PH3 valve closed
1/7/2011	5:53:13 PM	SiCl4 pre valve closed
1/7/2011	5:53:13 PM	SiCl4 post valve closed
1/7/2011	5:53:13 PM	Bubbler valve closed
1/7/2011	5:53:13 PM	Main Vac valve opened
1/7/2011	5:53:13 PM	Bypass valve opened
1/7/2011	5:53:13 PM	Helium MFC set to  0.000000
1/7/2011	5:53:13 PM	H2 MFC set to  0.000000
1/7/2011	5:53:13 PM	BCl3 MFC set to  0.000000
1/7/2011	5:53:13 PM	PHl3 MFC set to  0.000000
1/7/2011	5:53:13 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:53:13 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:53:13 PM	Tube furnace set to 0
1/7/2011	5:54:13 PM	H2 valve closed
1/7/2011	5:54:13 PM	BCl3 valve closed
1/7/2011	5:54:13 PM	PH3 valve closed
1/7/2011	5:54:13 PM	SiCl4 pre valve closed
1/7/2011	5:54:13 PM	SiCl4 post valve closed
1/7/2011	5:54:13 PM	Bubbler valve closed
1/7/2011	5:54:13 PM	Helium valve opened
1/7/2011	5:54:13 PM	Main Vac valve opened
1/7/2011	5:54:13 PM	Bypass valve opened
1/7/2011	5:54:13 PM	Helium MFC set to  100.000000
1/7/2011	5:54:13 PM	H2 MFC set to  0.000000
1/7/2011	5:54:13 PM	BCl3 MFC set to  0.000000
1/7/2011	5:54:13 PM	PHl3 MFC set to  0.000000
1/7/2011	5:54:13 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:54:13 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:54:14 PM	Tube furnace set to 0
1/7/2011	5:55:14 PM	Helium valve closed
1/7/2011	5:55:14 PM	H2 valve closed
1/7/2011	5:55:14 PM	BCl3 valve closed
1/7/2011	5:55:14 PM	PH3 valve closed
1/7/2011	5:55:14 PM	SiCl4 pre valve closed
1/7/2011	5:55:14 PM	SiCl4 post valve closed
1/7/2011	5:55:14 PM	Bubbler valve closed
1/7/2011	5:55:14 PM	Main Vac valve opened
1/7/2011	5:55:14 PM	Bypass valve opened
1/7/2011	5:55:14 PM	Helium MFC set to  0.000000
1/7/2011	5:55:14 PM	H2 MFC set to  0.000000
1/7/2011	5:55:14 PM	BCl3 MFC set to  0.000000
1/7/2011	5:55:14 PM	PHl3 MFC set to  0.000000
1/7/2011	5:55:14 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:55:14 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:55:14 PM	Tube furnace set to 0
1/7/2011	5:56:14 PM	H2 valve closed
1/7/2011	5:56:14 PM	BCl3 valve closed
1/7/2011	5:56:14 PM	PH3 valve closed
1/7/2011	5:56:14 PM	SiCl4 pre valve closed
1/7/2011	5:56:14 PM	SiCl4 post valve closed
1/7/2011	5:56:14 PM	Bubbler valve closed
1/7/2011	5:56:14 PM	Helium valve opened
1/7/2011	5:56:14 PM	Main Vac valve opened
1/7/2011	5:56:14 PM	Bypass valve opened
1/7/2011	5:56:14 PM	Helium MFC set to  100.000000
1/7/2011	5:56:14 PM	H2 MFC set to  0.000000
1/7/2011	5:56:14 PM	BCl3 MFC set to  0.000000
1/7/2011	5:56:14 PM	PHl3 MFC set to  0.000000
1/7/2011	5:56:14 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:56:14 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:56:14 PM	Tube furnace set to 0
1/7/2011	5:57:14 PM	Helium valve closed
1/7/2011	5:57:14 PM	H2 valve closed
1/7/2011	5:57:14 PM	BCl3 valve closed
1/7/2011	5:57:14 PM	PH3 valve closed
1/7/2011	5:57:14 PM	SiCl4 pre valve closed
1/7/2011	5:57:14 PM	SiCl4 post valve closed
1/7/2011	5:57:14 PM	Bubbler valve closed
1/7/2011	5:57:14 PM	Main Vac valve opened
1/7/2011	5:57:14 PM	Bypass valve opened
1/7/2011	5:57:14 PM	Helium MFC set to  0.000000
1/7/2011	5:57:14 PM	H2 MFC set to  0.000000
1/7/2011	5:57:14 PM	BCl3 MFC set to  0.000000
1/7/2011	5:57:14 PM	PHl3 MFC set to  0.000000
1/7/2011	5:57:14 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:57:14 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:57:14 PM	Tube furnace set to 0
1/7/2011	5:58:14 PM	H2 valve closed
1/7/2011	5:58:14 PM	BCl3 valve closed
1/7/2011	5:58:14 PM	PH3 valve closed
1/7/2011	5:58:14 PM	SiCl4 pre valve closed
1/7/2011	5:58:14 PM	SiCl4 post valve closed
1/7/2011	5:58:14 PM	Bubbler valve closed
1/7/2011	5:58:14 PM	Helium valve opened
1/7/2011	5:58:14 PM	Main Vac valve opened
1/7/2011	5:58:14 PM	Bypass valve opened
1/7/2011	5:58:14 PM	Helium MFC set to  100.000000
1/7/2011	5:58:14 PM	H2 MFC set to  0.000000
1/7/2011	5:58:14 PM	BCl3 MFC set to  0.000000
1/7/2011	5:58:14 PM	PHl3 MFC set to  0.000000
1/7/2011	5:58:14 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:58:14 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:58:14 PM	Tube furnace set to 0
1/7/2011	5:59:14 PM	Helium valve closed
1/7/2011	5:59:14 PM	H2 valve closed
1/7/2011	5:59:14 PM	BCl3 valve closed
1/7/2011	5:59:14 PM	PH3 valve closed
1/7/2011	5:59:14 PM	SiCl4 pre valve closed
1/7/2011	5:59:14 PM	SiCl4 post valve closed
1/7/2011	5:59:14 PM	Bubbler valve closed
1/7/2011	5:59:14 PM	Main Vac valve opened
1/7/2011	5:59:14 PM	Bypass valve opened
1/7/2011	5:59:14 PM	Helium MFC set to  0.000000
1/7/2011	5:59:14 PM	H2 MFC set to  0.000000
1/7/2011	5:59:14 PM	BCl3 MFC set to  0.000000
1/7/2011	5:59:14 PM	PHl3 MFC set to  0.000000
1/7/2011	5:59:14 PM	SiCl4 MFC set to  0.000000
1/7/2011	5:59:14 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	5:59:15 PM	Tube furnace set to 0
1/7/2011	6:00:15 PM	H2 valve closed
1/7/2011	6:00:15 PM	BCl3 valve closed
1/7/2011	6:00:15 PM	PH3 valve closed
1/7/2011	6:00:15 PM	SiCl4 pre valve closed
1/7/2011	6:00:15 PM	SiCl4 post valve closed
1/7/2011	6:00:15 PM	Bubbler valve closed
1/7/2011	6:00:15 PM	Helium valve opened
1/7/2011	6:00:15 PM	Main Vac valve opened
1/7/2011	6:00:15 PM	Bypass valve opened
1/7/2011	6:00:15 PM	Helium MFC set to  100.000000
1/7/2011	6:00:15 PM	H2 MFC set to  0.000000
1/7/2011	6:00:15 PM	BCl3 MFC set to  0.000000
1/7/2011	6:00:15 PM	PHl3 MFC set to  0.000000
1/7/2011	6:00:15 PM	SiCl4 MFC set to  0.000000
1/7/2011	6:00:15 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	6:00:15 PM	Tube furnace set to 0
1/7/2011	6:01:15 PM	Helium valve closed
1/7/2011	6:01:15 PM	H2 valve closed
1/7/2011	6:01:15 PM	BCl3 valve closed
1/7/2011	6:01:15 PM	PH3 valve closed
1/7/2011	6:01:15 PM	SiCl4 pre valve closed
1/7/2011	6:01:15 PM	SiCl4 post valve closed
1/7/2011	6:01:15 PM	Bubbler valve closed
1/7/2011	6:01:15 PM	Main Vac valve opened
1/7/2011	6:01:15 PM	Bypass valve opened
1/7/2011	6:01:15 PM	Helium MFC set to  0.000000
1/7/2011	6:01:15 PM	H2 MFC set to  0.000000
1/7/2011	6:01:15 PM	BCl3 MFC set to  0.000000
1/7/2011	6:01:15 PM	PHl3 MFC set to  0.000000
1/7/2011	6:01:15 PM	SiCl4 MFC set to  0.000000
1/7/2011	6:01:15 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	6:01:15 PM	Tube furnace set to 0
1/7/2011	6:02:15 PM	H2 valve closed
1/7/2011	6:02:15 PM	BCl3 valve closed
1/7/2011	6:02:15 PM	PH3 valve closed
1/7/2011	6:02:15 PM	SiCl4 pre valve closed
1/7/2011	6:02:15 PM	SiCl4 post valve closed
1/7/2011	6:02:15 PM	Bubbler valve closed
1/7/2011	6:02:15 PM	Helium valve opened
1/7/2011	6:02:15 PM	Main Vac valve opened
1/7/2011	6:02:15 PM	Bypass valve opened
1/7/2011	6:02:15 PM	Helium MFC set to  100.000000
1/7/2011	6:02:15 PM	H2 MFC set to  0.000000
1/7/2011	6:02:15 PM	BCl3 MFC set to  0.000000
1/7/2011	6:02:15 PM	PHl3 MFC set to  0.000000
1/7/2011	6:02:15 PM	SiCl4 MFC set to  0.000000
1/7/2011	6:02:15 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	6:02:15 PM	Tube furnace set to 0
1/7/2011	6:03:15 PM	Helium valve closed
1/7/2011	6:03:15 PM	H2 valve closed
1/7/2011	6:03:15 PM	BCl3 valve closed
1/7/2011	6:03:15 PM	PH3 valve closed
1/7/2011	6:03:15 PM	SiCl4 pre valve closed
1/7/2011	6:03:15 PM	SiCl4 post valve closed
1/7/2011	6:03:15 PM	Bubbler valve closed
1/7/2011	6:03:15 PM	Main Vac valve opened
1/7/2011	6:03:15 PM	Bypass valve opened
1/7/2011	6:03:15 PM	Helium MFC set to  0.000000
1/7/2011	6:03:15 PM	H2 MFC set to  0.000000
1/7/2011	6:03:15 PM	BCl3 MFC set to  0.000000
1/7/2011	6:03:15 PM	PHl3 MFC set to  0.000000
1/7/2011	6:03:15 PM	SiCl4 MFC set to  0.000000
1/7/2011	6:03:15 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	6:03:15 PM	Tube furnace set to 0
1/7/2011	6:03:16 PM	Run finished at 6:03 PM
1/7/2011	6:03:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/7/2011	7:09:32 PM	Bypass valve closed
1/7/2011	7:09:33 PM	Main Vac valve closed
1/7/2011	7:09:42 PM	Main Vac valve opened
1/7/2011	7:09:43 PM	Bypass valve opened
1/7/2011	7:10:00 PM	Recipe started at 7:10 PM
1/7/2011	7:10:00 PM	Helium valve closed
1/7/2011	7:10:00 PM	BCl3 valve closed
1/7/2011	7:10:00 PM	PH3 valve closed
1/7/2011	7:10:00 PM	SiCl4 pre valve closed
1/7/2011	7:10:00 PM	SiCl4 post valve closed
1/7/2011	7:10:00 PM	Main Vac valve closed
1/7/2011	7:10:00 PM	Bypass valve closed
1/7/2011	7:10:00 PM	Bubbler valve closed
1/7/2011	7:10:00 PM	H2 valve opened
1/7/2011	7:10:00 PM	Helium MFC set to  0.000000
1/7/2011	7:10:00 PM	H2 MFC set to  500.000000
1/7/2011	7:10:00 PM	BCl3 MFC set to  0.000000
1/7/2011	7:10:00 PM	PHl3 MFC set to  0.000000
1/7/2011	7:10:01 PM	SiCl4 MFC set to  0.000000
1/7/2011	7:10:01 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	7:10:01 PM	Tube furnace set to 0
1/7/2011	7:11:20 PM	Helium valve closed
1/7/2011	7:11:20 PM	BCl3 valve closed
1/7/2011	7:11:20 PM	PH3 valve closed
1/7/2011	7:11:20 PM	SiCl4 pre valve closed
1/7/2011	7:11:20 PM	SiCl4 post valve closed
1/7/2011	7:11:20 PM	Main Vac valve closed
1/7/2011	7:11:20 PM	Bypass valve closed
1/7/2011	7:11:20 PM	H2 valve opened
1/7/2011	7:11:20 PM	Bubbler valve opened
1/7/2011	7:11:20 PM	Helium MFC set to  0.000000
1/7/2011	7:11:20 PM	H2 MFC set to  500.000000
1/7/2011	7:11:20 PM	BCl3 MFC set to  0.000000
1/7/2011	7:11:20 PM	PHl3 MFC set to  0.000000
1/7/2011	7:11:20 PM	SiCl4 MFC set to  0.000000
1/7/2011	7:11:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	7:11:20 PM	Tube furnace set to 1000
1/7/2011	7:31:20 PM	Helium valve closed
1/7/2011	7:31:20 PM	PH3 valve closed
1/7/2011	7:31:20 PM	Main Vac valve closed
1/7/2011	7:31:20 PM	Bypass valve closed
1/7/2011	7:31:20 PM	H2 valve opened
1/7/2011	7:31:20 PM	BCl3 valve opened
1/7/2011	7:31:20 PM	SiCl4 pre valve opened
1/7/2011	7:31:20 PM	SiCl4 post valve opened
1/7/2011	7:31:20 PM	Bubbler valve opened
1/7/2011	7:31:20 PM	Helium MFC set to  0.000000
1/7/2011	7:31:20 PM	H2 MFC set to  500.000000
1/7/2011	7:31:20 PM	BCl3 MFC set to  1.800000
1/7/2011	7:31:20 PM	PHl3 MFC set to  0.000000
1/7/2011	7:31:20 PM	SiCl4 MFC set to  50.000000
1/7/2011	7:31:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	7:31:20 PM	Tube furnace set to 1000
1/7/2011	7:46:20 PM	H2 valve closed
1/7/2011	7:46:20 PM	BCl3 valve closed
1/7/2011	7:46:20 PM	PH3 valve closed
1/7/2011	7:46:20 PM	SiCl4 pre valve closed
1/7/2011	7:46:20 PM	SiCl4 post valve closed
1/7/2011	7:46:20 PM	Main Vac valve closed
1/7/2011	7:46:20 PM	Bypass valve closed
1/7/2011	7:46:20 PM	Helium valve opened
1/7/2011	7:46:20 PM	Bubbler valve opened
1/7/2011	7:46:20 PM	Helium MFC set to  500.000000
1/7/2011	7:46:20 PM	H2 MFC set to  0.000000
1/7/2011	7:46:20 PM	BCl3 MFC set to  0.000000
1/7/2011	7:46:20 PM	PHl3 MFC set to  0.000000
1/7/2011	7:46:20 PM	SiCl4 MFC set to  0.000000
1/7/2011	7:46:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	7:46:20 PM	Tube furnace set to 0
1/7/2011	8:06:20 PM	Helium valve closed
1/7/2011	8:06:20 PM	H2 valve closed
1/7/2011	8:06:20 PM	BCl3 valve closed
1/7/2011	8:06:20 PM	PH3 valve closed
1/7/2011	8:06:20 PM	SiCl4 pre valve closed
1/7/2011	8:06:20 PM	SiCl4 post valve closed
1/7/2011	8:06:20 PM	Main Vac valve closed
1/7/2011	8:06:20 PM	Bypass valve closed
1/7/2011	8:06:20 PM	Bubbler valve closed
1/7/2011	8:06:20 PM	Helium MFC set to  0.000000
1/7/2011	8:06:20 PM	H2 MFC set to  0.000000
1/7/2011	8:06:20 PM	BCl3 MFC set to  0.000000
1/7/2011	8:06:20 PM	PHl3 MFC set to  0.000000
1/7/2011	8:06:20 PM	SiCl4 MFC set to  0.000000
1/7/2011	8:06:20 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	8:06:20 PM	Tube furnace set to 0
1/7/2011	8:06:21 PM	Run finished at 8:06 PM
1/7/2011	8:15:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	8:15:45 PM	Recipe started at 8:15 PM
1/7/2011	8:15:45 PM	H2 valve closed
1/7/2011	8:15:45 PM	BCl3 valve closed
1/7/2011	8:15:45 PM	PH3 valve closed
1/7/2011	8:15:45 PM	SiCl4 pre valve closed
1/7/2011	8:15:45 PM	SiCl4 post valve closed
1/7/2011	8:15:45 PM	Main Vac valve closed
1/7/2011	8:15:45 PM	Bypass valve closed
1/7/2011	8:15:45 PM	Bubbler valve closed
1/7/2011	8:15:45 PM	Helium valve opened
1/7/2011	8:15:45 PM	Helium MFC set to  500.000000
1/7/2011	8:15:45 PM	H2 MFC set to  0.000000
1/7/2011	8:15:45 PM	BCl3 MFC set to  0.000000
1/7/2011	8:15:45 PM	PHl3 MFC set to  0.000000
1/7/2011	8:15:45 PM	SiCl4 MFC set to  0.000000
1/7/2011	8:15:45 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	8:15:45 PM	Tube furnace set to 0
1/7/2011	8:15:47 PM	Helium valve closed
1/7/2011	8:15:47 PM	H2 valve closed
1/7/2011	8:15:47 PM	BCl3 valve closed
1/7/2011	8:15:47 PM	PH3 valve closed
1/7/2011	8:15:47 PM	SiCl4 pre valve closed
1/7/2011	8:15:47 PM	SiCl4 post valve closed
1/7/2011	8:15:47 PM	Main Vac valve closed
1/7/2011	8:15:47 PM	Bypass valve closed
1/7/2011	8:15:47 PM	Bubbler valve closed
1/7/2011	8:15:47 PM	Helium MFC set to  0.000000
1/7/2011	8:15:47 PM	H2 MFC set to  0.000000
1/7/2011	8:15:47 PM	BCl3 MFC set to  0.000000
1/7/2011	8:15:47 PM	PHl3 MFC set to  0.000000
1/7/2011	8:15:47 PM	SiCl4 MFC set to  0.000000
1/7/2011	8:15:47 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	8:15:47 PM	Tube furnace set to 0
1/7/2011	8:15:47 PM	Run finished at 8:15 PM
1/7/2011	8:15:47 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/7/2011	8:18:05 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/7/2011	8:18:06 PM	Recipe started at 8:18 PM
1/7/2011	8:18:06 PM	Helium valve closed
1/7/2011	8:18:06 PM	H2 valve closed
1/7/2011	8:18:06 PM	BCl3 valve closed
1/7/2011	8:18:06 PM	PH3 valve closed
1/7/2011	8:18:06 PM	SiCl4 pre valve closed
1/7/2011	8:18:06 PM	SiCl4 post valve closed
1/7/2011	8:18:06 PM	Main Vac valve closed
1/7/2011	8:18:06 PM	Bubbler valve closed
1/7/2011	8:18:06 PM	Bypass valve opened
1/7/2011	8:18:06 PM	Helium MFC set to  0.000000
1/7/2011	8:18:06 PM	H2 MFC set to  0.000000
1/7/2011	8:18:06 PM	BCl3 MFC set to  0.000000
1/7/2011	8:18:06 PM	PHl3 MFC set to  0.000000
1/7/2011	8:18:06 PM	SiCl4 MFC set to  0.000000
1/7/2011	8:18:06 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	8:18:06 PM	Tube furnace set to 0
1/7/2011	8:19:05 PM	Helium valve closed
1/7/2011	8:19:05 PM	H2 valve closed
1/7/2011	8:19:05 PM	BCl3 valve closed
1/7/2011	8:19:05 PM	PH3 valve closed
1/7/2011	8:19:05 PM	SiCl4 pre valve closed
1/7/2011	8:19:05 PM	SiCl4 post valve closed
1/7/2011	8:19:05 PM	Bubbler valve closed
1/7/2011	8:19:05 PM	Main Vac valve opened
1/7/2011	8:19:05 PM	Bypass valve opened
1/7/2011	8:19:05 PM	Helium MFC set to  0.000000
1/7/2011	8:19:05 PM	H2 MFC set to  0.000000
1/7/2011	8:19:05 PM	BCl3 MFC set to  0.000000
1/7/2011	8:19:05 PM	PHl3 MFC set to  0.000000
1/7/2011	8:19:05 PM	SiCl4 MFC set to  0.000000
1/7/2011	8:19:05 PM	Bypass solenoid MFC set to  0.000000
1/7/2011	8:19:06 PM	Tube furnace set to 0
1/7/2011	8:19:06 PM	Run finished at 8:19 PM
1/7/2011	8:19:06 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
